Description
Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing is challenging since input to test a MEMS device require physical stimulus like acceleration, pressure etc. Also, MEMS device vary with process and requires calibration to make them reliable.
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Contributors
- Kundur, Vinay (Author)
- Bakkaloglu, Bertan (Committee member)
- Ozev, Sule (Committee member)
- Kiaei, Sayfe (Committee member)
- Arizona State University (Publisher)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
2013
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Note
- Partial requirement for: M.S., Arizona State University, 2013Note typethesis
- Includes bibliographical references (p. 69-71)Note typebibliography
- Field of study: Electrical engineering
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by Vinay Kundur