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Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing

Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing is challenging since input to test a MEMS device require physical stimulus like acceleration, pressure etc. Also, MEMS device vary with process and requires calibration to make them reliable. This increases test cost and testing time.

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    Date Created
    • 2013
    Resource Type
  • Text
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    Note
    • Partial requirement for: M.S., Arizona State University, 2013
      Note type
      thesis
    • Includes bibliographical references (p. 69-71)
      Note type
      bibliography
    • Field of study: Electrical engineering

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    by Vinay Kundur

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