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Micro-Electro Mechanical System (MEMS) is the micro-scale technology applying on various fields. Traditional testing strategy of MEMS requires physical stimulus, which leads to high cost specified equipment. Also there are

Micro-Electro Mechanical System (MEMS) is the micro-scale technology applying on various fields. Traditional testing strategy of MEMS requires physical stimulus, which leads to high cost specified equipment. Also there are a large number of wafer-level measurements for MEMS. A method of estimation calibration coefficient only by electrical stimulus based wafer level measurements is included in the thesis. Moreover, a statistical technique is introduced that can reduce the number of wafer level measurements, meanwhile obtaining an accurate estimate of unmeasured parameters.

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    Date Created
    • 2012
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  • Text
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    Note
    • Partial requirement for: M.S., Arizona State University, 2012
      Note type
      thesis
    • Includes bibliographical references (p. 58-60)
      Note type
      bibliography
    • Field of study: Electrical engineering

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    by Lingfei Deng

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