application/pdf

Download count: 0

Details

Contributors
Date Created
  • 2004
Resource Type
  • Text
  • Collections this item is in
    Identifier
    Note

    Citation and reuse

    Cite this item

    This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.

    S. R. Johnson, Yu. G. Sadofyev, D. Ding, Y. Cao, S. A. Chaparro, K. Franzreb, and Y.-H. Zhang, Journal of Vacuum Science & Technology B 22, 1436 (2004)

    Machine-readable links