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In this dissertation, the nanofabrication process is characterized for fabrication of nanostructure on surface of silicon and gallium phosphide using silica nanosphere lithography (SNL) and metal assisted chemical etching (MACE) process.

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    Date Created
    2021
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    Note
    • Partial requirement for: Ph.D., Arizona State University, 2021
    • Field of study: Electrical Engineering

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