application/pdf

Download count: 0

Details

Contributors
Date Created
  • 2000
Resource Type
  • Text
  • Collections this item is in
    Identifier
    Note

    Citation and reuse

    Cite this item

    This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.

    M. Beaudoin, E. Grassi, S. R. Johnson, K. Ramaswamy, K. Tsakalis, T. L. Alford, and Y.-H. Zhang, Journal of Vacuum Science & Technology B 18, 1435 (2000)

    Machine-readable links