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Title
- Real Time in Situ Composition Control of InGaAs Lattice Matched to InP by an 88-Wavelength Ellipsometer
Contributors
- Kuo, C.-H. (Author)
- Boonzaayer, Martin D. (Author)
- DeHerrera, M. (Author)
- Kyong, T. (Author)
- Zhang, Yong-Hang (Author)
- Johs, B. (Author)
- Hale, J. S. (Author)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
1998
Resource Type
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Identifier
- Digital object identifier: 10.1116/1.589971
Note
- Copyright 1998 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/16/3/10.1116/1.589971, opens in a new window
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Cite this item
This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.
C.-H. Kuo, M. Boonzaayer, M. DeHerrera, T. Kyong, Y.-H. Zhang, B. Johs, and J. S. Hale, Journal of Vacuum Science & Technology B 16, 1484 (1998)