Description

Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive

Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged.

Reuse Permissions
  • application/pdf

    Download count: 0

    Details

    Contributors
    Date Created
    • 2013-12-05
    Resource Type
  • Text
  • Collections this item is in
    Identifier
    • Digital object identifier: 10.3390/mi4040431
    • Identifier Type
      International standard serial number
      Identifier Value
      2072-666X

    Citation and reuse

    Cite this item

    This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.

    Ren, H., Wang, W., Tao, F., & Yao, J. (2013). A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines, 4(4), 431-443. doi:10.3390/mi4040431

    Machine-readable links