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This dissertation presents my work on development of deformable electronics using microelectromechanical systems (MEMS) based fabrication technologies. In recent years, deformable electronics are coming to revolutionize the functionality of microelectronics seamlessly with their application environment, ranging from various consumer electronics to bio-medical applications. Many researchers have studied this area, and

This dissertation presents my work on development of deformable electronics using microelectromechanical systems (MEMS) based fabrication technologies. In recent years, deformable electronics are coming to revolutionize the functionality of microelectronics seamlessly with their application environment, ranging from various consumer electronics to bio-medical applications. Many researchers have studied this area, and a wide variety of devices have been fabricated. One traditional way is to directly fabricate electronic devices on flexible substrate through low-temperature processes. These devices suffered from constrained functionality due to the temperature limit. Another transfer printing approach has been developed recently. The general idea is to fabricate functional devices on hard and planar substrates using standard processes then transferred by elastomeric stamps and printed on desired flexible and stretchable substrates. The main disadvantages are that the transfer printing step may limit the yield. The third method is "flexible skins" which silicon substrates are thinned down and structured into islands and sandwiched by two layers of polymer. The main advantage of this method is post CMOS compatible. Based on this technology, we successfully fabricated a 3-D flexible thermal sensor for intravascular flow monitoring. The final product of the 3-D sensor has three independent sensing elements equally distributed around the wall of catheter (1.2 mm in diameter) with 120° spacing. This structure introduces three independent information channels, and cross-comparisons among all readings were utilized to eliminate experimental error and provide better measurement results. The novel fabrication and assembly technology can also be applied to other catheter based biomedical devices. A step forward inspired by the ancient art of folding, origami, which creating three-dimensional (3-D) structures from two-dimensional (2-D) sheets through a high degree of folding along the creases. Based on this idea, we developed a novel method to enable better deformability. One example is origami-enabled silicon solar cells. The solar panel can reach up to 644% areal compactness while maintain reasonable good performance (less than 30% output power density drop) upon 40 times cyclic folding/unfolding. This approach can be readily applied to other functional devices, ranging from sensors, displays, antenna, to energy storage devices.
ContributorsTang, Rui (Author) / Yu, Hongyu (Thesis advisor) / Jiang, Hanqing (Committee member) / Pan, George (Committee member) / Goryll, Michael (Committee member) / Arizona State University (Publisher)
Created2014
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BioMEMS has the potential to provide many future tools for life sciences, combined with microfabrication technologies and biomaterials. Especially due to the recent corona 19 epidemic, interest in BioMEMS technology has increased significantly, and the related research has also grown significantly. The field with the highest demand for BioMEMS devices

BioMEMS has the potential to provide many future tools for life sciences, combined with microfabrication technologies and biomaterials. Especially due to the recent corona 19 epidemic, interest in BioMEMS technology has increased significantly, and the related research has also grown significantly. The field with the highest demand for BioMEMS devices is in the medical field. In particular, the implantable device field is the largest sector where cutting-edge BioMEMS technology is applied along with nanotechnology, artificial intelligence, genetic engineering, etc. However, implantable devices used for brain diseases are still very limited because unlike other parts of human organs, the brain is still unknow area which cannot be completely replaceable.To date, the most commercially used, almost only, implantable device for the brain is a shunt system for the treatment of hydrocephalus. The current cerebrospinal fluid (CSF) shunt treatment yields high failure rates: ~40% within first 2 years and 98% within 10 years. These failures lead to high hospital admission rates and repeated invasive surgical procedures, along with reduced quality of life. New treatments are needed to improve the disease burden associated with hydrocephalus. In this research, the proposed catheter-free, completely-passive miniaturized valve is designed to alleviate hydrocephalus at the originating site of the disorder and diminish failure mechanisms associated with current treatment methods. The valve is composed of hydrogel diaphragm structure and polymer or glass outer frame which are 100% bio-compatible material. The valve aims to be implanted between the sub-arachnoid space and the superior sagittal sinus to regulate the CSF flow substituting for the obstructed arachnoid granulations.
A cardiac pacemaker is one of the longest and most widely used implantable devices and the wireless technology is the most widely used with it for easy acquisition of vital signs and rapid disease diagnosis without clinical surgery. But the conventional pacemakers with some wireless technology face some essential complications associated with finite battery life, ultra-vein pacing leads, and risk of infection from device pockets and leads. To solve these problems, wireless cardiac pacemaker operating in fully-passive modality is proposed and demonstrates the promising potential by realizing a prototype and functional evaluating.
ContributorsLee, Seunghyun (Author) / Christen, Jennifer (Thesis advisor) / Goryll, Michael (Committee member) / Nikkhah, Mehdi (Committee member) / Sohn, SungMin (Committee member) / Arizona State University (Publisher)
Created2020