ASU Electronic Theses and Dissertations
This collection includes most of the ASU Theses and Dissertations from 2011 to present. ASU Theses and Dissertations are available in downloadable PDF format; however, a small percentage of items are under embargo. Information about the dissertations/theses includes degree information, committee members, an abstract, supporting data or media.
In addition to the electronic theses found in the ASU Digital Repository, ASU Theses and Dissertations can be found in the ASU Library Catalog.
Dissertations and Theses granted by Arizona State University are archived and made available through a joint effort of the ASU Graduate College and the ASU Libraries. For more information or questions about this collection contact or visit the Digital Repository ETD Library Guide or contact the ASU Graduate College at gradformat@asu.edu.
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Description
Buildings consume nearly 50% of the total energy in the United States, which drives the need to develop high-fidelity models for building energy systems. Extensive methods and techniques have been developed, studied, and applied to building energy simulation and forecasting, while most of work have focused on developing dedicated modeling approach for generic buildings. In this study, an integrated computationally efficient and high-fidelity building energy modeling framework is proposed, with the concentration on developing a generalized modeling approach for various types of buildings. First, a number of data-driven simulation models are reviewed and assessed on various types of computationally expensive simulation problems. Motivated by the conclusion that no model outperforms others if amortized over diverse problems, a meta-learning based recommendation system for data-driven simulation modeling is proposed. To test the feasibility of the proposed framework on the building energy system, an extended application of the recommendation system for short-term building energy forecasting is deployed on various buildings. Finally, Kalman filter-based data fusion technique is incorporated into the building recommendation system for on-line energy forecasting. Data fusion enables model calibration to update the state estimation in real-time, which filters out the noise and renders more accurate energy forecast. The framework is composed of two modules: off-line model recommendation module and on-line model calibration module. Specifically, the off-line model recommendation module includes 6 widely used data-driven simulation models, which are ranked by meta-learning recommendation system for off-line energy modeling on a given building scenario. Only a selective set of building physical and operational characteristic features is needed to complete the recommendation task. The on-line calibration module effectively addresses system uncertainties, where data fusion on off-line model is applied based on system identification and Kalman filtering methods. The developed data-driven modeling framework is validated on various genres of buildings, and the experimental results demonstrate desired performance on building energy forecasting in terms of accuracy and computational efficiency. The framework could be easily implemented into building energy model predictive control (MPC), demand response (DR) analysis and real-time operation decision support systems.
ContributorsCui, Can (Author) / Wu, Teresa (Thesis advisor) / Weir, Jeffery D. (Thesis advisor) / Li, Jing (Committee member) / Fowler, John (Committee member) / Hu, Mengqi (Committee member) / Arizona State University (Publisher)
Created2016
Description
Yield is a key process performance characteristic in the capital-intensive semiconductor fabrication process. In an industry where machines cost millions of dollars and cycle times are a number of months, predicting and optimizing yield are critical to process improvement, customer satisfaction, and financial success. Semiconductor yield modeling is essential to identifying processing issues, improving quality, and meeting customer demand in the industry. However, the complicated fabrication process, the massive amount of data collected, and the number of models available make yield modeling a complex and challenging task. This work presents modeling strategies to forecast yield using generalized linear models (GLMs) based on defect metrology data. The research is divided into three main parts. First, the data integration and aggregation necessary for model building are described, and GLMs are constructed for yield forecasting. This technique yields results at both the die and the wafer levels, outperforms existing models found in the literature based on prediction errors, and identifies significant factors that can drive process improvement. This method also allows the nested structure of the process to be considered in the model, improving predictive capabilities and violating fewer assumptions. To account for the random sampling typically used in fabrication, the work is extended by using generalized linear mixed models (GLMMs) and a larger dataset to show the differences between batch-specific and population-averaged models in this application and how they compare to GLMs. These results show some additional improvements in forecasting abilities under certain conditions and show the differences between the significant effects identified in the GLM and GLMM models. The effects of link functions and sample size are also examined at the die and wafer levels. The third part of this research describes a methodology for integrating classification and regression trees (CART) with GLMs. This technique uses the terminal nodes identified in the classification tree to add predictors to a GLM. This method enables the model to consider important interaction terms in a simpler way than with the GLM alone, and provides valuable insight into the fabrication process through the combination of the tree structure and the statistical analysis of the GLM.
ContributorsKrueger, Dana Cheree (Author) / Montgomery, Douglas C. (Thesis advisor) / Fowler, John (Committee member) / Pan, Rong (Committee member) / Pfund, Michele (Committee member) / Arizona State University (Publisher)
Created2011