Matching Items (8)
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- All Subjects: Accelerometers
- All Subjects: Antennas (Electronics)
- Creators: Yu, Hongyu
- Creators: Aberle, James T
Description
"Sensor Decade" has been labeled on the first decade of the 21st century. Similar to the revolution of micro-computer in 1980s, sensor R&D; developed rapidly during the past 20 years. Hard workings were mainly made to minimize the size of devices with optimal the performance. Efforts to develop the small size devices are mainly concentrated around Micro-electro-mechanical-system (MEMS) technology. MEMS accelerometers are widely published and used in consumer electronics, such as smart phones, gaming consoles, anti-shake camera and vibration detectors. This study represents liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET), in which inertial mass is not the only but also the conversion of mechanical movement to electric current signal is the main utilization of the ionic liquid. With silicon-based planar micro-fabrication, the device uses a sub-micron liter electrolyte droplet sealed in oil as the sensing body and a MET electrode arrangement which is the anode-cathode-cathode-anode (ACCA) in parallel as the read-out sensing part. In order to sensing the movement of ionic liquid, an imposed electric potential was applied between the anode and the cathode. The electrode reaction, I_3^-+2e^___3I^-, occurs around the cathode which is reverse at the anodes. Obviously, the current magnitude varies with the concentration of ionic liquid, which will be effected by the movement of liquid droplet as the inertial mass. With such structure, the promising performance of the MET device design is to achieve 10.8 V/G (G=9.81 m/s^2) sensitivity at 20 Hz with the bandwidth from 1 Hz to 50 Hz, and a low noise floor of 100 ug/sqrt(Hz) at 20 Hz.
ContributorsLiang, Mengbing (Author) / Yu, Hongyu (Thesis advisor) / Jiang, Hanqing (Committee member) / Kozicki, Micheal (Committee member) / Arizona State University (Publisher)
Created2013
Description
This thesis presents approaches to develop micro seismometers and accelerometers based on molecular electronic transducers (MET) technology using MicroElectroMechanical Systems (MEMS) techniques. MET is a technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. It consists of an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. MET seismometers have advantages of high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed with inter-electrode spacing close to 1μm, which improves the sensitivity of fabricated device to above 3000 V/(m/s^2) under operating bias of 600 mV and input acceleration of 400 μG (G=9.81m/s^2) at 0.32 Hz. The lowered hydrodynamic resistance by increasing the number of channels improves the self-noise to -127 dB equivalent to 44 nG/√Hz at 1 Hz. An alternative approach to build the sensing element of MEMS MET seismometer using SOI process is also presented in this thesis. The significantly increased number of channels is expected to improve the noise performance. Inspired by the advantages of combining MET and MEMS technologies on the development of seismometer, a low frequency accelerometer utilizing MET technology with post-CMOS-compatible fabrication processes is developed. In the fabricated accelerometer, the complicated fabrication of mass-spring system in solid-state MEMS accelerometer is replaced with a much simpler post-CMOS-compatible process containing only deposition of a four-electrode MET structure on a planar substrate, and a liquid inertia mass of an electrolyte droplet encapsulated by oil film. The fabrication process does not involve focused ion beam milling which is used in the micro MET seismometer fabrication, thus the cost is lowered. Furthermore, the planar structure and the novel idea of using an oil film as the sealing diaphragm eliminate the complicated three-dimensional packaging of the seismometer. The fabricated device achieves 10.8 V/G sensitivity at 20 Hz with nearly flat response over the frequency range from 1 Hz to 50 Hz, and a low noise floor of 75 μG/√Hz at 20 Hz.
ContributorsHuang, Hai (Author) / Yu, Hongyu (Thesis advisor) / Jiang, Hanqing (Committee member) / Dai, Lenore (Committee member) / Si, Jennie (Committee member) / Arizona State University (Publisher)
Created2014
Description
In this thesis, an approach to develop low-frequency accelerometer based on molecular electronic transducers (MET) in an electrochemical cell is presented. Molecular electronic transducers are a class of inertial sensors which are based on an electrochemical mechanism. Motion sensors based on MET technology consist of an electrochemical cell that can be used to detect the movement of liquid electrolyte between electrodes by converting it to an output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise, small size and independence on the direction of sensitivity axis. In addition, the fact that MET based sensors have a liquid inertial mass with no moving parts makes them rugged and shock tolerant (basic survivability has been demonstrated to >20 kG).
A Zn-Cu electrochemical cell (Galvanic cell) was applied in the low-frequency accelerometer. Experimental results show that external vibrations (range from 18 to 70 Hz) were successfully detected by this accelerometer as reactions Zn→〖Zn〗^(2+)+2e^- occurs around the anode and 〖Cu〗^(2+)+2e^-→Cu around the cathode. Accordingly, the sensitivity of this MET device design is to achieve 10.4 V/G at 18 Hz. And the sources of noise have been analyzed.
A Zn-Cu electrochemical cell (Galvanic cell) was applied in the low-frequency accelerometer. Experimental results show that external vibrations (range from 18 to 70 Hz) were successfully detected by this accelerometer as reactions Zn→〖Zn〗^(2+)+2e^- occurs around the anode and 〖Cu〗^(2+)+2e^-→Cu around the cathode. Accordingly, the sensitivity of this MET device design is to achieve 10.4 V/G at 18 Hz. And the sources of noise have been analyzed.
ContributorsZhao, Zuofeng (Author) / Yu, Hongyu (Thesis advisor) / Zhang, Junshan (Committee member) / Jiang, Hanqing (Committee member) / Arizona State University (Publisher)
Created2015
Description
In this dissertation a new wideband circular HIS is proposed. The circular periodicity made it possible to illuminate the surface with a cylindrical TEMz wave and; a novel technique is utilized to make it wideband. Two models are developed to analyze the
reflection characteristics of the proposed HIS.
The circularly symmetric high impedance surface is used as a ground plane for the design of a low-profile loop and spiral radiating elements. It is shown that a HIS with circular periodicity provides a wider operational bandwidth for curvilinear radiating elements such, such as loops and spirals, compared to canonical rectangular HISs.
It is also observed that, with the aid of a circular HIS ground plane the gain of a loop and a spiral increases compared to when a perfect magnetic conductor (PMC) or rectangular HIS is used as a ground plane. The circular HIS was fabricated and the loop and spiral elements were placed individually in close proximity to it.
Also, due to the growing demand for low-radar signature (RCS) antennas for advanced airborne vehicles, curved and flexible HIS ground planes, which meet both the aerodynamic and low RCS requirements, have recently become popular candidates within the antenna and microwave technology. This encouraged us, to propose a spherical HIS where a 2-D curvature is introduced to the previously designed flat HIS.
The major problem associated with spherical HIS is the impact of the curvature on its reflection properties. After characterization of the flat circular HIS, which is addressed in the first part of this dissertation, a spherical curvature is introduced to the flat circular HIS and its impact on the reflection properties was examined when it was illuminated with the same cylindrical TEMz wave. The same technique, as for the flat HIS ground plane, is utilized to make the spherical HIS wideband. A loop and spiral element were placed in the vicinity of the curved HIS and their performanceswere investigated. The HISs were also fabricated and measurements were conducted to verify the simulations. An excellent agreement was observed.
reflection characteristics of the proposed HIS.
The circularly symmetric high impedance surface is used as a ground plane for the design of a low-profile loop and spiral radiating elements. It is shown that a HIS with circular periodicity provides a wider operational bandwidth for curvilinear radiating elements such, such as loops and spirals, compared to canonical rectangular HISs.
It is also observed that, with the aid of a circular HIS ground plane the gain of a loop and a spiral increases compared to when a perfect magnetic conductor (PMC) or rectangular HIS is used as a ground plane. The circular HIS was fabricated and the loop and spiral elements were placed individually in close proximity to it.
Also, due to the growing demand for low-radar signature (RCS) antennas for advanced airborne vehicles, curved and flexible HIS ground planes, which meet both the aerodynamic and low RCS requirements, have recently become popular candidates within the antenna and microwave technology. This encouraged us, to propose a spherical HIS where a 2-D curvature is introduced to the previously designed flat HIS.
The major problem associated with spherical HIS is the impact of the curvature on its reflection properties. After characterization of the flat circular HIS, which is addressed in the first part of this dissertation, a spherical curvature is introduced to the flat circular HIS and its impact on the reflection properties was examined when it was illuminated with the same cylindrical TEMz wave. The same technique, as for the flat HIS ground plane, is utilized to make the spherical HIS wideband. A loop and spiral element were placed in the vicinity of the curved HIS and their performanceswere investigated. The HISs were also fabricated and measurements were conducted to verify the simulations. An excellent agreement was observed.
ContributorsAmiri, Mikal Askarian (Author) / Balanis, Constantine A (Thesis advisor) / Aberle, James T (Committee member) / Bakkaloglu, Bertan (Committee member) / Trichopoulos, Georgios C (Committee member) / Arizona State University (Publisher)
Created2018
Description
To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection because the scattered signals from a multiplicity of such elements would end up interfering with each other. However, an alternative massively parallelized configuration, consisting of a remotely interrogating array of dipoles, capable of interrogating multiple adjacent areas of the surface at the same time, was proposed in 2002.
In the present work a remotely interrogating slot antenna inside a 60nm silver slab is designed which increases the signal to noise ratio of the original system. The antenna is tuned to resonance at 600nm range by taking advantage of the plasmon resonance properties of the metal’s negative permittivity and judicious shaping of the slot element. Full-physics simulations show the capability of detecting an 8nm particle using red light illumination. The sensitivity to the λ/78 particle is attained by detecting the change induced on the antenna’s far field signature by the proximate particle, a change that is 15dB greater than the scattering signature of the particle by itself.
To verify the capabilities of this technology in a readily accessible experimental environment, a radiofrequency scale model is designed using a meta-material to mimic the optical properties of silver in the 2GHz to 5GHz range. Various approaches to the replication of the metal’s behavior are explored in a trade-off between fidelity to the metal’s natural plasmon response, desired bandwidth of the demonstration, and
ii
manufacturability of the meta-material. The simulation and experimental results successfully verify the capability of the proposed near-field sensor in sub-wavelength detection and imaging not only as a proof of concept for optical frequencies but also as a potential imaging device for radio frequencies.
In the present work a remotely interrogating slot antenna inside a 60nm silver slab is designed which increases the signal to noise ratio of the original system. The antenna is tuned to resonance at 600nm range by taking advantage of the plasmon resonance properties of the metal’s negative permittivity and judicious shaping of the slot element. Full-physics simulations show the capability of detecting an 8nm particle using red light illumination. The sensitivity to the λ/78 particle is attained by detecting the change induced on the antenna’s far field signature by the proximate particle, a change that is 15dB greater than the scattering signature of the particle by itself.
To verify the capabilities of this technology in a readily accessible experimental environment, a radiofrequency scale model is designed using a meta-material to mimic the optical properties of silver in the 2GHz to 5GHz range. Various approaches to the replication of the metal’s behavior are explored in a trade-off between fidelity to the metal’s natural plasmon response, desired bandwidth of the demonstration, and
ii
manufacturability of the meta-material. The simulation and experimental results successfully verify the capability of the proposed near-field sensor in sub-wavelength detection and imaging not only as a proof of concept for optical frequencies but also as a potential imaging device for radio frequencies.
ContributorsMostafavi, Mahkamehossadat (Author) / Diaz, Rodolfo E (Thesis advisor) / Pan, George W (Committee member) / Aberle, James T (Committee member) / Ning, Cun-Zheng (Committee member) / Arizona State University (Publisher)
Created2016
Description
The instrumentational measurement of seismic motion is important for a wide range of research fields and applications, such as seismology, geology, physics, civil engineering and harsh environment exploration. This report presents series approaches to develop Micro-Electro-Mechanical System (MEMS) enhanced inertial motion sensors including accelerometers, seismometers and inclinometers based on Molecular Electronic Transducers (MET) techniques.
Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed with inter-electrode spacing close to 5 μm. The employment of MEMS improves the sensitivity of fabricated device to above 2500 V/(m/s2) under operating bias of 300 mV and input velocity of 8.4μm/s from 0.08Hz to 80Hz. The lowered hydrodynamic resistance by increasing the number of channels improves the self-noise to -135 dB equivalent to 18nG/√Hz (G=9.8m/s2) around 1.2 Hz.
Inspired by the advantages of combining MET and MEMS technologies on the development of seismometer, a feasibility study of development of a low frequency accelerometer utilizing MET technology with post-CMOS-compatible fabrication processes is performed. In the fabricated accelerometer, the complicated fabrication of mass-spring system in solid-state MEMS accelerometer is replaced with a much simpler post-CMOS-compatible process containing only deposition of a four-electrode MET structure on a planar substrate, and a liquid inertia mass of an electrolyte droplet. With a specific design of 3D printing based package and replace water based iodide solution by room temperature ionic liquid based electrolyte, the sensitivity relative to the ground motion can reach 103.69V/g, with the resolution of 5.25μG/√Hz at 1Hz.
By combining MET techniques and Zn-Cu electrochemical cell (Galvanic cell), this letter demonstrates a passive motion sensor powered by self-electrochemistry energy, named “Battery Accelerometer”. The experimental results indicated the peak sensitivity of battery accelerometer at its resonant frequency 18Hz is 10.4V/G with the resolution of 1.71μG without power consumption.
Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed with inter-electrode spacing close to 5 μm. The employment of MEMS improves the sensitivity of fabricated device to above 2500 V/(m/s2) under operating bias of 300 mV and input velocity of 8.4μm/s from 0.08Hz to 80Hz. The lowered hydrodynamic resistance by increasing the number of channels improves the self-noise to -135 dB equivalent to 18nG/√Hz (G=9.8m/s2) around 1.2 Hz.
Inspired by the advantages of combining MET and MEMS technologies on the development of seismometer, a feasibility study of development of a low frequency accelerometer utilizing MET technology with post-CMOS-compatible fabrication processes is performed. In the fabricated accelerometer, the complicated fabrication of mass-spring system in solid-state MEMS accelerometer is replaced with a much simpler post-CMOS-compatible process containing only deposition of a four-electrode MET structure on a planar substrate, and a liquid inertia mass of an electrolyte droplet. With a specific design of 3D printing based package and replace water based iodide solution by room temperature ionic liquid based electrolyte, the sensitivity relative to the ground motion can reach 103.69V/g, with the resolution of 5.25μG/√Hz at 1Hz.
By combining MET techniques and Zn-Cu electrochemical cell (Galvanic cell), this letter demonstrates a passive motion sensor powered by self-electrochemistry energy, named “Battery Accelerometer”. The experimental results indicated the peak sensitivity of battery accelerometer at its resonant frequency 18Hz is 10.4V/G with the resolution of 1.71μG without power consumption.
ContributorsLiang, Mengbing (Author) / Yu, Hongyu (Thesis advisor) / Dai, Lenore (Committee member) / Kozicki, Michael (Committee member) / Jiang, Hanqing (Committee member) / Arizona State University (Publisher)
Created2016
Description
High Impedance Surfaces (HISs), which have been investigated extensively, have proven to be very efficient ground planes for low profile antenna applications due to their unique reflection phase characteristics. Another emerging research field among the microwave and antenna technologies is the design of flexible antennas and microwave circuits to be utilized in conformal applications. The combination of those two research topics gives birth to a third one, namely the design of Conformal or Flexible HISs (FHISs), which is the main subject of this dissertation. The problems associated with the FHISs are twofold: characterization and physical realization. The characterization involves the analysis of scattering properties of FHISs in the presence of plane wave and localized sources. For this purpose, an approximate analytical method is developed to characterize the reflection properties of a cylindrically curved FHIS. The effects of curvature on the reflection phase of the curved FHISs are examined. Furthermore, the effects of different types of currents, specifically the ones inherent to finite sized periodic structures, on the reflection phase characteristics are observed. After the reflection phase characterization of curved HISs, the performance of dipole antennas located in close proximity to a curved HIS are investigated, and the results are compared with the flat case. Different types of resonances that may occur for such a low-profile antenna application are discussed. The effects of curvature on the radiation performance of antennas are examined. Commercially available flexible materials are relatively thin which degrades the bandwidth of HISs. Another practical aspect, which is related to the substrate thickness, is the compactness of the surface. Because of the design limitations of conventional HISs, it is not possible to miniaturize the HIS and increase the bandwidth, simultaneously. To overcome this drawback, a novel HIS is proposed with a periodically perforated ground plane. Copper plated through holes are extremely vulnerable to bending and should be avoided at the bending parts of flexible circuits. Fortunately, if designed properly, the perforations on the ground plane may result in suppression of surface waves. Hence, metallic posts can be eliminated without hindering the surface wave suppression properties of HISs.
ContributorsDurgun, Ahmet Cemal (Author) / Balanis, Constantine A (Thesis advisor) / Aberle, James T (Committee member) / Yu, Hongyu (Committee member) / Bakkaloglu, Bertan (Committee member) / Arizona State University (Publisher)
Created2013
Description
Micro-Electro Mechanical System (MEMS) is the micro-scale technology applying on various fields. Traditional testing strategy of MEMS requires physical stimulus, which leads to high cost specified equipment. Also there are a large number of wafer-level measurements for MEMS. A method of estimation calibration coefficient only by electrical stimulus based wafer level measurements is included in the thesis. Moreover, a statistical technique is introduced that can reduce the number of wafer level measurements, meanwhile obtaining an accurate estimate of unmeasured parameters. To improve estimation accuracy, outlier analysis is the effective technique and merged in the test flow. Besides, an algorithm for optimizing test set is included, also providing numerical estimated prediction error.
ContributorsDeng, Lingfei (Author) / Ozev, Sule (Thesis advisor) / Yu, Hongyu (Committee member) / Christen, Jennifer Blain (Committee member) / Arizona State University (Publisher)
Created2012