Matching Items (3)
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- All Subjects: MEMS
- Creators: Pan, George
Description
This dissertation proposes a miniature FIR filter that works at microwave frequencies, whose filter response can ideally be digitally programmed. Such a frequency agile device can find applications in cellular communications and wireless networking. The basic concept of the FIR filter utilizes a low loss acoustic waveguide of appropriate geometry that acts as a traveling wave tapped-delay line. The input RF signal is applied by an array of capacitive transducers at various locations on the acoustic waveguide at one end that excites waves of a propagating acoustic mode with varying spatial delays and amplitudes which interfere as they propagate. The output RF signal is picked up at the other end of the waveguide by another array of capacitive transducers. Tuning of the FIR filter coefficients is realized by controlling the DC voltage profile applied to the individual transducers which essentially shapes the overall filter response. Equivalent circuit modeling of the capacitive transducer, acoustic waveguide and transducer-line coupling is presented in this dissertation. A theoretical model for the filter is developed from a general theory of an array of transducers exciting a waveguide and is used to obtain a set of filter design equations. A MATLAB based circuit simulator is developed to simulate the filter responses. Design parameters and simulation results obtained for an example waveguide structure are presented and compared to the values estimated by the theoretical model. A waveguide structure utilizing the Rayleigh-like mode of a ridge is then introduced. A semi-analytical method to obtain propagating elastic modes of such a ridge waveguide etched in an anisotropic crystal is presented. Microfabrication of a filter based on ridges etched in single crystal Silicon is discussed along with details of the challenges faced. Finally, future work and a few alternative designs are presented that can have a better chance of success. Analysis and modeling work to this point has given a good understanding of the working principles, performance tradeoffs and fabrication pitfalls of the proposed device. With the appropriate acoustic waveguide structure, the proposed device could make it possible to realize miniature programmable FIR filters in the GHz range.
ContributorsGalinde, Ameya (Author) / Abbaspour-Tamijani, Abbas (Thesis advisor) / Chae, Junseok (Committee member) / Pan, George (Committee member) / Phillips, Stephen (Committee member) / Arizona State University (Publisher)
Created2013
Description
This dissertation presents my work on development of deformable electronics using microelectromechanical systems (MEMS) based fabrication technologies. In recent years, deformable electronics are coming to revolutionize the functionality of microelectronics seamlessly with their application environment, ranging from various consumer electronics to bio-medical applications. Many researchers have studied this area, and a wide variety of devices have been fabricated. One traditional way is to directly fabricate electronic devices on flexible substrate through low-temperature processes. These devices suffered from constrained functionality due to the temperature limit. Another transfer printing approach has been developed recently. The general idea is to fabricate functional devices on hard and planar substrates using standard processes then transferred by elastomeric stamps and printed on desired flexible and stretchable substrates. The main disadvantages are that the transfer printing step may limit the yield. The third method is "flexible skins" which silicon substrates are thinned down and structured into islands and sandwiched by two layers of polymer. The main advantage of this method is post CMOS compatible. Based on this technology, we successfully fabricated a 3-D flexible thermal sensor for intravascular flow monitoring. The final product of the 3-D sensor has three independent sensing elements equally distributed around the wall of catheter (1.2 mm in diameter) with 120° spacing. This structure introduces three independent information channels, and cross-comparisons among all readings were utilized to eliminate experimental error and provide better measurement results. The novel fabrication and assembly technology can also be applied to other catheter based biomedical devices. A step forward inspired by the ancient art of folding, origami, which creating three-dimensional (3-D) structures from two-dimensional (2-D) sheets through a high degree of folding along the creases. Based on this idea, we developed a novel method to enable better deformability. One example is origami-enabled silicon solar cells. The solar panel can reach up to 644% areal compactness while maintain reasonable good performance (less than 30% output power density drop) upon 40 times cyclic folding/unfolding. This approach can be readily applied to other functional devices, ranging from sensors, displays, antenna, to energy storage devices.
ContributorsTang, Rui (Author) / Yu, Hongyu (Thesis advisor) / Jiang, Hanqing (Committee member) / Pan, George (Committee member) / Goryll, Michael (Committee member) / Arizona State University (Publisher)
Created2014
Description
Graphene is a very strong two-dimensional material with a lot of potential applications in microelectromechanical systems (MEMS). In this research, graphene is being optimized for use in a 5 m x 5 m graphene resonator. To work properly, this graphene resonator must have a uniform strain across all manufactured devices. To reduce strain induced in graphene sheets grown for use in these resonators, evaporated platinum has been used in this investigation due to its relatively lower surface roughness compared to copper films. The final goal is to have the layer of ultrathin platinum (<=200 nm) deposited on the MEMS graphene resonator and used to grow graphene directly onto the devices to remove the manual transfer step due to its inscalability. After growth, graphene is coated with polymer and the platinum is then etched. This investigation concentrated on the transfer process of graphene onto Si/SiO2 substrate from the platinum films. It was determined that the ideal platinum etchant was aqua regia at a volumetric ratio of 6:3:1 (H2O:HCl:HNO3). This concentration was dilute enough to preserve the polymer and graphene layer, but strong enough to etch within a day. Type and thickness of polymer support layers were also investigated. PMMA at a thickness of 200 nm was ideal because it was easy to remove with acetone and strong enough to support the graphene during the etch process. A reference growth recipe was used in this investigation, but now that the transfer has been demonstrated, growth can be optimized for even thinner films.
ContributorsCayll, David Richard (Author) / Tongay, Sefaattin (Thesis director) / Lee, Hyunglae (Committee member) / Mechanical and Aerospace Engineering Program (Contributor) / Barrett, The Honors College (Contributor)
Created2016-12