Matching Items (7)
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- All Subjects: Microelectromechanical Systems
- Creators: Kiaei, Sayfe
- Creators: Aberle, James T., 1961-
Description
Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing is challenging since input to test a MEMS device require physical stimulus like acceleration, pressure etc. Also, MEMS device vary with process and requires calibration to make them reliable. This increases test cost and testing time. This challenge can be overcome by combining electrical stimulus based testing along with statistical analysis on MEMS response for electrical stimulus and also limited physical stimulus response data. This thesis proposes electrical stimulus based built in self test(BIST) which can be used to get MEMS data and later this data can be used for statistical analysis. A capacitive MEMS accelerometer is considered to test this BIST approach. This BIST circuit overhead is less and utilizes most of the standard readout circuit. This thesis discusses accelerometer response for electrical stimulus and BIST architecture. As a part of this BIST circuit, a second order sigma delta modulator has been designed. This modulator has a sampling frequency of 1MHz and bandwidth of 6KHz. SNDR of 60dB is achieved with 1Vpp differential input signal and 3.3V supply
ContributorsKundur, Vinay (Author) / Bakkaloglu, Bertan (Committee member) / Ozev, Sule (Committee member) / Kiaei, Sayfe (Committee member) / Arizona State University (Publisher)
Created2013
Description
The applications which use MEMS accelerometer have been on rise and many new fields which are using the MEMS devices have been on rise. The industry is trying to reduce the cost of production of these MEMS devices. These devices are manufactured using micromachining and the interface circuitry is manufactured using CMOS and the final product is integrated on to a single chip. Amount spent on testing of the MEMS devices make up a considerable share of the total final cost of the device. In order to save the cost and time spent on testing, researchers have been trying to develop different methodologies. At present, MEMS devices are tested using mechanical stimuli to measure the device parameters and for calibration the device. This testing is necessary since the MEMS process is not a very well controlled process unlike CMOS. This is done using an ATE and the cost of using ATE (automatic testing equipment) contribute to 30-40% of the devices final cost. This thesis proposes an architecture which can use an Electrical Signal to stimulate the MEMS device and use the data from the MEMS response in approximating the calibration coefficients efficiently. As a proof of concept, we have designed a BIST (Built-in self-test) circuit for MEMS accelerometer. The BIST has an electrical stimulus generator, Capacitance-to-voltage converter, ∑ ∆ ADC. This thesis explains in detail the design of the Electrical stimulus generator. We have also designed a technique to correlate the parameters obtained from electrical stimuli to those obtained by mechanical stimuli. This method is cost effective since the additional circuitry needed to implement BIST is less since the technique utilizes most of the existing standard readout circuitry already present.
ContributorsJangala Naga, Naveen Sai (Author) / Ozev, Sule (Thesis advisor) / Bakkaloglu, Bertan (Committee member) / Kiaei, Sayfe (Committee member) / Arizona State University (Publisher)
Created2014
Description
A dual-channel directional digital hearing aid (DHA) front-end using a fully differential difference amplifier (FDDA) based Microphone interface circuit (MIC) for a capacitive Micro Electro Mechanical Systems (MEMS) microphones and an adaptive-power analog font end (AFE) is presented. The Microphone interface circuit based on FDDA converts the capacitance variations into voltage signal, achieves a noise of 32 dB SPL (sound pressure level) and an SNR of 72 dB, additionally it also performs single to differential conversion allowing for fully differential analog signal chain. The analog front-end consists of 40dB VGA and a power scalable continuous time sigma delta ADC, with 68dB SNR dissipating 67u¬W from a 1.2V supply. The ADC implements a self calibrating feedback DAC, for calibrating the 2nd order non-linearity. The VGA and power scalable ADC is fabricated on 0.25 um CMOS TSMC process. The dual channels of the DHA are precisely matched and achieve about 0.5dB gain mismatch, resulting in greater than 5dB directivity index. This will enable a highly integrated and low power DHA
ContributorsNaqvi, Syed Roomi (Author) / Kiaei, Sayfe (Thesis advisor) / Bakkaloglu, Bertan (Committee member) / Chae, Junseok (Committee member) / Barnby, Hugh (Committee member) / Aberle, James T., 1961- (Committee member) / Arizona State University (Publisher)
Created2011
Description
Power supply management is important for MEMS (Micro-Electro-Mechanical-Systems) bio-sensing and chemical sensing applications. The dissertation focuses on discussion of accessibility to different power sources and supply tuning in sensing applications. First, the dissertation presents a high efficiency DC-DC converter for a miniaturized Microbial Fuel Cell (MFC). The miniaturized MFC produces up to approximately 10µW with an output voltage of 0.4-0.7V. Such a low voltage, which is also load dependent, prevents the MFC to directly drive low power electronics. A PFM (Pulse Frequency Modulation) type DC-DC converter in DCM (Discontinuous Conduction Mode) is developed to address the challenges and provides a load independent output voltage with high conversion efficiency. The DC-DC converter, implemented in UMC 0.18µm technology, has been thoroughly characterized, coupled with the MFC. At 0.9V output, the converter has a peak efficiency of 85% with 9µW load, highest efficiency over prior publication. Energy could be harvested wirelessly and often has profound impacts on system performance. The dissertation reports a side-by-side comparison of two wireless and passive sensing systems: inductive and electromagnetic (EM) couplings for an application of in-situ and real-time monitoring of wafer cleanliness in semiconductor facilities. The wireless system, containing the MEMS sensor works with battery-free operations. Two wireless systems based on inductive and EM couplings have been implemented. The working distance of the inductive coupling system is limited by signal-to-noise-ratio (SNR) while that of the EM coupling is limited by the coupled power. The implemented on-wafer transponders achieve a working distance of 6 cm and 25 cm with a concentration resolution of less than 2% (4 ppb for a 200 ppb solution) for inductive and EM couplings, respectively. Finally, the supply tuning is presented in bio-sensing application to mitigate temperature sensitivity. The FBAR (film bulk acoustic resonator) based oscillator is an attractive method in label-free sensing application. Molecular interactions on FBAR surface induce mass change, which results in resonant frequency shift of FBAR. While FBAR has a high-Q to be sensitive to the molecular interactions, FBAR has finite temperature sensitivity. A temperature compensation technique is presented that improves the temperature coefficient of a 1.625 GHz FBAR-based oscillator from -118 ppm/K to less than 1 ppm/K by tuning the supply voltage of the oscillator. The tuning technique adds no additional component and has a large frequency tunability of -4305 ppm/V.
ContributorsZhang, Xu (Author) / Chae, Junseok (Thesis advisor) / Kiaei, Sayfe (Committee member) / Bakkaloglu, Bertan (Committee member) / Kozicki, Michael (Committee member) / Phillips, Stephen (Committee member) / Arizona State University (Publisher)
Created2012
Description
Semiconductor device scaling has kept up with Moore's law for the past decades and they have been scaling by a factor of half every one and half years. Every new generation of device technology opens up new opportunities and challenges and especially so for analog design. High speed and low gain is characteristic of these processes and hence a tradeoff that can enable to get back gain by trading speed is crucial. This thesis proposes a solution that increases the speed of sampling of a circuit by a factor of three while reducing the specifications on analog blocks and keeping the power nearly constant. The techniques are based on the switched capacitor technique called Correlated Level Shifting. A triple channel Cyclic ADC has been implemented, with each channel working at a sampling frequency of 3.33MS/s and a resolution of 14 bits. The specifications are compared with that based on a traditional architecture to show the superiority of the proposed technique.
ContributorsSivakumar, Balasubramanian (Author) / Farahani, Bahar Jalali (Thesis advisor) / Garrity, Douglas (Committee member) / Bakkaloglu, Bertan (Committee member) / Aberle, James T., 1961- (Committee member) / Arizona State University (Publisher)
Created2012
Description
ABSTRACT
Designers creating the next generation remote sensing enabled smart devices need to overcome the challenges of prevailing ventures including time to market and expense.
To reduce the time and effort involved in initial prototyping, a good reference design is often desired and warranted. This paper provides the necessary reference materials for Designers to implement a wireless solution efficiently and effectively.
This document is intended for users with limited Bluetooth technology experience.
Many sensing-enabled devices require a ‘hard-wire’ or cable link to a host monitoring system. This can limit the potential for product advancements by anchoring the system to a single location preventing portability and the convenience of a remote system. By removing the “wired” or cabled portion from a design, a broader scope of devices becomes feasible.
One common problematic area for these types of sensors is within the internal medicine field. Proximity sensing is far more practical and less invasive to implement than surgical implantation. Bluetooth Low Energy (BLE) systems solve the hard wired problem by decoupling the physical sensor from the host system through a BLE transceiver that can send information to an external monitoring system. This wireless link enables new sensor technology to be leveraged into previously unobtainable markets; such as, internal medicine, wearable devices, and Infotainment to name a few. Wireless technology for sensor systems are a potentially disruptive technology changing the way environmental monitoring is implemented and considered.
With this BLE design reference, products can be created with new capabilities to advance current technologies for military, commercial, industrial and medical sectors in rapid succession.
Designers creating the next generation remote sensing enabled smart devices need to overcome the challenges of prevailing ventures including time to market and expense.
To reduce the time and effort involved in initial prototyping, a good reference design is often desired and warranted. This paper provides the necessary reference materials for Designers to implement a wireless solution efficiently and effectively.
This document is intended for users with limited Bluetooth technology experience.
Many sensing-enabled devices require a ‘hard-wire’ or cable link to a host monitoring system. This can limit the potential for product advancements by anchoring the system to a single location preventing portability and the convenience of a remote system. By removing the “wired” or cabled portion from a design, a broader scope of devices becomes feasible.
One common problematic area for these types of sensors is within the internal medicine field. Proximity sensing is far more practical and less invasive to implement than surgical implantation. Bluetooth Low Energy (BLE) systems solve the hard wired problem by decoupling the physical sensor from the host system through a BLE transceiver that can send information to an external monitoring system. This wireless link enables new sensor technology to be leveraged into previously unobtainable markets; such as, internal medicine, wearable devices, and Infotainment to name a few. Wireless technology for sensor systems are a potentially disruptive technology changing the way environmental monitoring is implemented and considered.
With this BLE design reference, products can be created with new capabilities to advance current technologies for military, commercial, industrial and medical sectors in rapid succession.
ContributorsHughes, Clinton Francis (Author) / Blain Christen, Jennifer (Thesis advisor) / Ozev, Sule (Committee member) / Ogras, Umit Y. (Committee member) / Aberle, James T., 1961- (Committee member) / Arizona State University (Publisher)
Created2015
Description
A dual-channel directional digital hearing aid (DHA) front end using Micro Electro Mechanical System (MEMS) microphones and an adaptive-power analog processing signal chain is presented. The analog front end consists of a double differential amplifier (DDA) based capacitance to voltage conversion circuit, 40dB variable gain amplifier (VGA) and a continuous time sigma delta analog to digital converter (CT - ΣΔ ADC). Adaptive power scaling of the 4th order CT - ΣΔ achieves 68dB SNR at 120μW, which can be scaled down to 61dB SNR at 67μW. This power saving will increse the battery life of the DHA.
ContributorsDeligoz, Ilker (Author) / Kiaei, Sayfe (Thesis advisor) / Bakkaloglu, Bertan (Committee member) / Jalali-Farahani, Bahar (Committee member) / Aberle, James T., 1961- (Committee member) / Chae, Junseok (Committee member) / Arizona State University (Publisher)
Created2010