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Description
Amorphous oxide semiconductors are promising new materials for various optoelectronic applications. In this study, improved electrical and optical properties upon thermal and microwave processing of mixed-oxide semiconductors are reported. First, arsenic-doped silicon was used as a model system to understand susceptor-assisted microwave annealing. Mixed oxide semiconductor films of indium zinc

Amorphous oxide semiconductors are promising new materials for various optoelectronic applications. In this study, improved electrical and optical properties upon thermal and microwave processing of mixed-oxide semiconductors are reported. First, arsenic-doped silicon was used as a model system to understand susceptor-assisted microwave annealing. Mixed oxide semiconductor films of indium zinc oxide (IZO) and indium gallium zinc oxide (IGZO) were deposited by room-temperature RF sputtering on flexible polymer substrates. Thermal annealing in different environments - air, vacuum and oxygen was done. Electrical and optical characterization was carried out before and after annealing. The degree of reversal in the degradation in electrical properties of the thin films upon annealing in oxygen was assessed by subjecting samples to subsequent vacuum anneals. To further increase the conductivity of the IGZO films, Ag layers of various thicknesses were embedded between two IGZO layers. Optical performance of the multilayer structures was improved by susceptor-assisted microwave annealing and furnace-annealing in oxygen environment without compromising on their electrical conductivity. The post-processing of the films in different environments was used to develop an understanding of mechanisms of carrier generation, transport and optical absorption. This study establishes IGZO as a viable transparent conductor, which can be deposited at room-temperature and processed by thermal and microwave annealing to improve electrical and optical performance for applications in flexible electronics and optoelectronics.
ContributorsGadre, Mandar (Author) / Alford, Terry L. (Thesis advisor) / Schroder, Dieter (Committee member) / Krause, Stephen (Committee member) / Theodore, David (Committee member) / Arizona State University (Publisher)
Created2011
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Description
This thesis discusses the use of low temperature microwave anneal as an alternative technique to recrystallize materials damaged or amorphized due to implantation techniques. The work focuses on the annealing of high-Z doped Si wafers that are incapable of attaining high temperatures required for recrystallizing the damaged implanted layers by

This thesis discusses the use of low temperature microwave anneal as an alternative technique to recrystallize materials damaged or amorphized due to implantation techniques. The work focuses on the annealing of high-Z doped Si wafers that are incapable of attaining high temperatures required for recrystallizing the damaged implanted layers by microwave absorption The increasing necessity for quicker and more efficient processing techniques motivates study of the use of a single frequency applicator microwave cavity along with a Fe2O3 infused SiC-alumina susceptor/applicator as an alternative post implantation process. Arsenic implanted Si samples of different dopant concentrations and implantation energies were studied pre and post microwave annealing. A set of as-implanted Si samples were also used to assess the effect of inactive dopants against presence of electrically active dopants on the recrystallization mechanisms. The extent of damage repair and Si recrystallization of the damage caused by arsenic and Si implantation of Si is determined by cross-section transmission electron microscopy and Raman spectroscopy. Dopant activation is evaluated for the As implanted Si by sheet resistance measurements. For the same, secondary ion mass spectroscopy analysis is used to compare the extent of diffusion that results from such microwave annealing with that experienced when using conventional rapid thermal annealing (RTA). Results show that compared to susceptor assisted microwave annealing, RTA caused undesired dopant diffusion. The SiC-alumina susceptor plays a predominant role in supplying heat to the Si substrate, and acts as an assistor that helps a high-Z dopant like arsenic to absorb the microwave energy using a microwave loss mechanism which is a combination of ionic and dipole losses. Comparisons of annealing of the samples were done with and without the use of the susceptor, and confirm the role played by the susceptor, since the samples donot recrystallize when the surface heating mechanism provided by the susceptor is not incorporated. Variable frequency microwave annealing was also performed over the as-implanted Si samples for durations and temperatures higher than the single frequency microwave anneal, but only partial recrystallization of the damaged layer was achieved.
ContributorsVemuri, Rajitha (Author) / Alford, Terry L. (Thesis advisor) / Theodore, David (Committee member) / Krause, Stephen (Committee member) / Arizona State University (Publisher)
Created2011
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Description
Zoos are doing amazing projects to help wildlife globally and locally. A lot of people aren't aware of what goes on with these conservation projects because much of it happens behind the scenes. So I decided to make a film to explain how zoos facilitate our world's wildlife. My film

Zoos are doing amazing projects to help wildlife globally and locally. A lot of people aren't aware of what goes on with these conservation projects because much of it happens behind the scenes. So I decided to make a film to explain how zoos facilitate our world's wildlife. My film can be viewed at this link: https://www.youtube.com/watch?v=_JmLGf138zY
ContributorsRossman, Chloe June (Author) / Sandler, Kevin (Thesis director) / Wells, Stuart (Committee member) / Barrett, The Honors College (Contributor) / School of Life Sciences (Contributor) / School of Film, Dance and Theatre (Contributor)
Created2014-05
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Description
Microwave (MW), thermal, and ultraviolet (UV) annealing were used to explore the response of Ag structures on a Ge-Se chalcogenide glass (ChG) thin film as flexible radiation sensors, and Te-Ti chalcogenide thin films as a material for diffusion barriers in microelectronics devices and processing of metallized Cu. Flexible resistive radiation

Microwave (MW), thermal, and ultraviolet (UV) annealing were used to explore the response of Ag structures on a Ge-Se chalcogenide glass (ChG) thin film as flexible radiation sensors, and Te-Ti chalcogenide thin films as a material for diffusion barriers in microelectronics devices and processing of metallized Cu. Flexible resistive radiation sensors consisting of Ag electrodes on a Ge20Se80 ChG thin film and polyethylene naphthalate substrate were exposed to UV radiation. The sensors were mounted on PVC tubes of varying radii to induce bending strains and annealed under ambient conditions up to 150 oC. Initial sensor resistance was measured to be ~1012 Ω; after exposure to UV radiation, the resistance was ~104 Ω. Bending strain and low temperature annealing had no significant effect on the resistance of the sensors. Samples of Cu on Te-Ti thin films were annealed in vacuum for up to 30 minutes and were stable up to 500 oC as revealed using Rutherford backscattering spectrometry (RBS) and four-point-probe analysis. X-ray diffractometry (XRD) indicates Cu grain growth up to 500 oC and phase instability of the Te-Ti barrier at 600 oC. MW processing was performed in a 2.45-GHz microwave cavity on Cu/Te-Ti films for up to 30 seconds to induce oxide growth. Using a calibrated pyrometer above the sample, the temperature of the MW process was measured to be below a maximum of 186 oC. Four-point-probe analysis shows an increase in resistance with an increase in MW time. XRD indicates growth of CuO on the sample surface. RBS suggests oxidation throughout the Te-Ti film. Additional samples were exposed to 907 J/cm2 UV radiation in order to ensure other possible electromagnetically induced mechanisms were not active. There were no changes observed using XRD, RBS or four point probing.
ContributorsRoos, Benjamin, 1990- (Author) / Alford, Terry L. (Thesis advisor) / Theodore, David (Committee member) / Kozicki, Michael (Committee member) / Arizona State University (Publisher)
Created2013
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Description
Rapid processing and reduced end-of-range diffusion effects demonstrate that susceptor-assisted microwave annealing is an efficient processing alternative for electrically activating dopants and removing ion-implantation damage in ion-implanted semiconductors. Sheet resistance and Hall measurements provide evidence of electrical activation. Raman spectroscopy and ion channeling analysis monitor the extent of ion implantation

Rapid processing and reduced end-of-range diffusion effects demonstrate that susceptor-assisted microwave annealing is an efficient processing alternative for electrically activating dopants and removing ion-implantation damage in ion-implanted semiconductors. Sheet resistance and Hall measurements provide evidence of electrical activation. Raman spectroscopy and ion channeling analysis monitor the extent of ion implantation damage and recrystallization. The presence of damage and defects in ion implanted silicon, and the reduction of the defects as a result of annealing, is observed by Rutherford backscattering spectrometry, moreover, the boron implanted silicon is further investigated by cross-section transmission electron microscopy. When annealing B+ implanted silicon, the dissolution of small extended defects and growth of large extended defects result in reduced crystalline quality that hinders the electrical activation process. Compared to B+ implanted silicon, phosphorus implanted samples experience more effective activation and achieve better crystalline quality. Comparison of end-of-range dopants diffusion resulting from microwave annealing and rapid thermal annealing (RTA) is done using secondary ion mass spectroscopy. Results from microwave annealed P+ implanted samples show that almost no diffusion occurs during time periods required for complete dopant activation and silicon recrystallization. The relative contributions to heating of the sample, by a SiC susceptor, and by Si self-heating in the microwave anneal, were also investigated. At first 20s, the main contributor to the sample's temperature rise is Si self-heating by microwave absorption.
ContributorsZhao, Zhao (Author) / Alford, Terry Lynn (Thesis advisor) / Theodore, David (Committee member) / Krause, Stephen (Committee member) / Arizona State University (Publisher)
Created2013
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Description
This work focuses on simulation of electrical resistivity and optical behaviors of thin films, where an Ag or Au thin layer is embedded in zinc oxide. Enhanced conductivity and transparency were earlier achieved with multilayer structured transparent conducting oxide (TCO) sandwich layer with metal (TCO/metal/TCO). Sputtering pattern of metal layer

This work focuses on simulation of electrical resistivity and optical behaviors of thin films, where an Ag or Au thin layer is embedded in zinc oxide. Enhanced conductivity and transparency were earlier achieved with multilayer structured transparent conducting oxide (TCO) sandwich layer with metal (TCO/metal/TCO). Sputtering pattern of metal layer is simulated to obtain the morphology, covered area fraction, and the percolation strength. The resistivity as a function of the metal layer thickness fits the modeled trend of covered area fraction beyond the percolation threshold. This result not only presents the robustness of the simulation, but also demonstrates the influence of metal morphology in multilayer structure. Effective medium coefficients are defined from the coverage and percolation strength to obtain simulated optical transmittance which matches experimental observation. The coherence of resistivity and optical transmittance validates the simulation of the sputtered pattern and the incorporation of percolation theory in the model.
ContributorsFang, Chia-Ling (Author) / Alford, Terry L. (Thesis advisor) / Crozier, Peter (Committee member) / Theodore, David (Committee member) / Arizona State University (Publisher)
Created2012
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Description
The globalization of dance offers a unique situation to encourage peace. The kinesthetic experience associated with dance builds communities and unites people without needing to share the same language or be in the same location on the planet. Dance is a vehicle to understand other cultures but how can people

The globalization of dance offers a unique situation to encourage peace. The kinesthetic experience associated with dance builds communities and unites people without needing to share the same language or be in the same location on the planet. Dance is a vehicle to understand other cultures but how can people be given the keys? As the 2014 Circumnavigator Travel Study Grant recipient for Arizona State University (ASU), I traveled to six countries in three continents over seventy-two days conducting ethnochoreology (dance ethnography) research. Upon returning I had a passion to share my experience through dance. Therefore I organized a charity dance concert. To share my kinesthetic education from my trip I taught six high schools each a dance from the countries I visited. An additional high school, elementary school and ASU students joined the concert. The performers and audience members gained new understanding, curiosity and appreciation. The proceeds of the concert have started a new scholarship for ASU students pursuing dance or studying abroad. This journey has come full circle just like the Circumnavigator trip which began this project. Knowledge of other dances from around the world invites participants to see into the heart of the culture, creating empathy. Therefore dance can ignite peace.
ContributorsCoury, Melia Ann (Author) / Vissicaro, Pegge (Thesis director) / Ostrom, Amy (Committee member) / Barrett, The Honors College (Contributor) / Herberger Institute for Design and the Arts (Contributor) / Department of Marketing (Contributor) / W. P. Carey School of Business (Contributor) / School of Film, Dance and Theatre (Contributor)
Created2015-05
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Description
A longing to revisit the people, places, and moments of my past has followed me for years, sometimes affecting me to the extent that the past seems to intrude on my present. In this piece, I wish to turn a critical eye on these feelings of nostalgia and examine how

A longing to revisit the people, places, and moments of my past has followed me for years, sometimes affecting me to the extent that the past seems to intrude on my present. In this piece, I wish to turn a critical eye on these feelings of nostalgia and examine how strong emotion can emerge from nothing more than fractured, faded memories. Using footage of moments I had recorded over six months of living in Europe, I seek to sculpt these images from my past into a form that rejects the daze of nostalgia for the fragmented truth of memory. My background is in more traditional narrative filmmaking, and so I was excited to work in this experimental three-screen format, in which I could explore the concept of memory in a manner that felt truer to how I actually experience it. I tested various combinations of imagery in my videos to build the progression of the piece, which I hoped would play out in an associational style that mimicked the process of my own memory. I hope that this will cause people to walk away from the piece thinking about how memory can fuel emotion and even to investigate their own relationship to the past.
ContributorsPowell, Matthew Rhys (Author) / Bradley, Christopher (Thesis director) / Brye, Anne (Committee member) / Barrett, The Honors College (Contributor) / School of International Letters and Cultures (Contributor) / School of Film, Dance and Theatre (Contributor)
Created2015-05
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Description
Body Integrity Identity Disorder Screenplay Abstract
The Body Integrity Identity Disorder Screenplay, tentatively entitled Detach, is a full-­‐length feature film script. Based on a fascinating mental disorder (generally referred to as the acronym BIID) where an individual does not associate a limb with the rest of their body, the script follows

Body Integrity Identity Disorder Screenplay Abstract
The Body Integrity Identity Disorder Screenplay, tentatively entitled Detach, is a full-­‐length feature film script. Based on a fascinating mental disorder (generally referred to as the acronym BIID) where an individual does not associate a limb with the rest of their body, the script follows a sufferer and a reporter attempting to write a story on his struggle.
As my creative sensibilities and skills have developed over the span of my undergraduate career, the most ambitious undertaking imaginable for myself at this moment is the completion of a feature script. This project was a significant test of my storytelling skills and ability to format an unusual tale into a conceivable film.
I am proud of the end result and believe that the final version of my screenplay is an accurate representation of my taste as a filmmaker. I hope to actualize this project one day and help facilitate a transformation of the script into a feature film.
ContributorsKitnick, Benjamin Allan (Author) / Bernstein, Gregory (Thesis director) / Miller, April (Committee member) / Barrett, The Honors College (Contributor) / School of Film, Dance and Theatre (Contributor)
Created2015-05
Description
Memory Wipe is a 22 minute, video art piece that utilizes home movie footage filmed on VHS and 8mm, as well as television and cartoon ephemera, to explore the way in which personal memory is constructed and altered through the process of recording and viewing. Three recent events in my

Memory Wipe is a 22 minute, video art piece that utilizes home movie footage filmed on VHS and 8mm, as well as television and cartoon ephemera, to explore the way in which personal memory is constructed and altered through the process of recording and viewing. Three recent events in my life inspired work: the discovery of a box containing my favorite childhood media, the revelation that I am the last male of my family, and the impending sale of my family's farmland. My mother never used a video camera, insisting that her childhood was lost in footage filmed but never watched. It should also be noted that not once do I appear in this piece; therefore, I decided to extract myself from the narrative. Rather than simply guide the audience along with anecdotes from my life, I instead invite viewers to draw their own meanings and create their own nostalgias from the piece. Originally, Memory Wipe was to be accompanied by live narration, but all things considered, I thought I would let it speak for itself. Video link: https://www.youtube.com/watch?v=-E42a6Koma4
ContributorsMcDougall, Clayton Ross (Author) / Magenta, Muriel (Thesis director) / Brye, Anne (Committee member) / Barrett, The Honors College (Contributor) / School of Film, Dance and Theatre (Contributor) / School of Historical, Philosophical and Religious Studies (Contributor)
Created2015-05