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- Genre: Masters Thesis
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Description
Semiconductor manufacturing facilities are very complex and capital intensive in nature. During the lifecycle of these facilities various disciplines come together, generate and use a tremendous amount of building and process information to support various decisions that enable them to successfully design, build and sustain these advanced facilities. However, a majority of the information generated and processes taking place are neither integrated nor interoperable and result in a high degree of redundancy. The objective of this thesis is to build an interoperable Building Information Model (BIM) for the Base-Build and Tool Installation in a semiconductor manufacturing facility. It examines existing processes and data exchange standards available to facilitate the implementation of BIM and provides a framework for the development of processes and standards that can help in building an intelligent information model for a semiconductor manufacturing facility. To understand the nature of the flow of information between the various stakeholders the flow of information between the facility designer, process tool manufacturer and tool layout designer is examined. An information model for the base build and process tool is built and the industry standards SEMI E6 and SEMI E51 are used as a basis to model the information. It is found that applications used to create information models support interoperable industry standard formats such as the Industry Foundation Classes (IFC) and ISO 15926 in a limited manner. A gap analysis has revealed that interoperability standards applicable to the semiconductor manufacturing industry such as the IFC and ISO15926 need to be expanded to support information transfers unique to the industry. Information modeling for a semiconductor manufacturing facility is unique in that it is a process model (Process Tool Information Model) within a building model (Building Information Model), each of them supported more robustly by different interoperability standards. Applications support interoperability data standards specific to the domain or industry they serve but information transfers need to occur between the various domains. To facilitate flow of information between the different domains it is recommended that a mapping of the industry standards be undertaken and translators between them be developed for business use.
ContributorsPindukuri, Shruthi (Author) / Chasey, Allan D (Thesis advisor) / Wiezel, Avi (Committee member) / Mamlouk, Michael (Committee member) / Arizona State University (Publisher)
Created2011
Description
Process variations have become increasingly important for scaled technologies starting at 45nm. The increased variations are primarily due to random dopant fluctuations, line-edge roughness and oxide thickness fluctuation. These variations greatly impact all aspects of circuit performance and pose a grand challenge to future robust IC design. To improve robustness, efficient methodology is required that considers effect of variations in the design flow. Analyzing timing variability of complex circuits with HSPICE simulations is very time consuming. This thesis proposes an analytical model to predict variability in CMOS circuits that is quick and accurate. There are several analytical models to estimate nominal delay performance but very little work has been done to accurately model delay variability. The proposed model is comprehensive and estimates nominal delay and variability as a function of transistor width, load capacitance and transition time. First, models are developed for library gates and the accuracy of the models is verified with HSPICE simulations for 45nm and 32nm technology nodes. The difference between predicted and simulated σ/μ for the library gates is less than 1%. Next, the accuracy of the model for nominal delay is verified for larger circuits including ISCAS'85 benchmark circuits. The model predicted results are within 4% error of HSPICE simulated results and take a small fraction of the time, for 45nm technology. Delay variability is analyzed for various paths and it is observed that non-critical paths can become critical because of Vth variation. Variability on shortest paths show that rate of hold violations increase enormously with increasing Vth variation.
ContributorsGummalla, Samatha (Author) / Chakrabarti, Chaitali (Thesis advisor) / Cao, Yu (Thesis advisor) / Bakkaloglu, Bertan (Committee member) / Arizona State University (Publisher)
Created2011
Description
This thesis pursues a method to deregulate the electric distribution system and provide support to distributed renewable generation. A locational marginal price is used to determine prices across a distribution network in real-time. The real-time pricing may provide benefits such as a reduced electricity bill, decreased peak demand, and lower emissions. This distribution locational marginal price (D-LMP) determines the cost of electricity at each node in the electrical network. The D-LMP is comprised of the cost of energy, cost of losses, and a renewable energy premium. The renewable premium is an adjustable function to compensate `green' distributed generation. A D-LMP is derived and formulated from the PJM model, as well as several alternative formulations. The logistics and infrastructure an implementation is briefly discussed. This study also takes advantage of the D-LMP real-time pricing to implement distributed storage technology. A storage schedule optimization is developed using linear programming. Day-ahead LMPs and historical load data are used to determine a predictive optimization. A test bed is created to represent a practical electric distribution system. Historical load, solar, and LMP data are used in the test bed to create a realistic environment. A power flow and tabulation of the D-LMPs was conducted for twelve test cases. The test cases included various penetrations of solar photovoltaics (PV), system networking, and the inclusion of storage technology. Tables of the D-LMPs and network voltages are presented in this work. The final costs are summed and the basic economics are examined. The use of a D-LMP can lower costs across a system when advanced technologies are used. Storage improves system costs, decreases losses, improves system load factor, and bolsters voltage. Solar energy provides many of these same attributes at lower penetrations, but high penetrations have a detrimental effect on the system. System networking also increases these positive effects. The D-LMP has a positive impact on residential customer cost, while greatly increasing the costs for the industrial sector. The D-LMP appears to have many positive impacts on the distribution system but proper cost allocation needs further development.
ContributorsKiefer, Brian Daniel (Author) / Heydt, Gerald T (Thesis advisor) / Shunk, Dan (Committee member) / Hedman, Kory (Committee member) / Arizona State University (Publisher)
Created2011
Description
Concrete columns constitute the fundamental supports of buildings, bridges, and various other infrastructures, and their failure could lead to the collapse of the entire structure. As such, great effort goes into improving the fire resistance of such columns. In a time sensitive fire situation, a delay in the failure of critical load bearing structures can lead to an increase in time allowed for the evacuation of occupants, recovery of property, and access to the fire. Much work has been done in improving the structural performance of concrete including reducing column sizes and providing a safer structure. As a result, high-strength (HS) concrete has been developed to fulfill the needs of such improvements. HS concrete varies from normal-strength (NS) concrete in that it has a higher stiffness, lower permeability and larger durability. This, unfortunately, has resulted in poor performance under fire. The lower permeability allows for water vapor to build up causing HS concrete to suffer from explosive spalling under rapid heating. In addition, the coefficient of thermal expansion (CTE) of HS concrete is lower than that of NS concrete. In this study, the effects of introducing a region of crumb rubber concrete into a steel-reinforced concrete column were analyzed. The inclusion of crumb rubber concrete into a column will greatly increase the thermal resistivity of the overall column, leading to a reduction in core temperature as well as the rate at which the column is heated. Different cases were analyzed while varying the positioning of the crumb-rubber region to characterize the effect of position on the improvement of fire resistance. Computer simulated finite element analysis was used to calculate the temperature and strain distribution with time across the column's cross-sectional area with specific interest in the steel - concrete region. Of the several cases which were investigated, it was found that the improvement of time before failure ranged between 32 to 45 minutes.
ContributorsZiadeh, Bassam Mohammed (Author) / Phelan, Patrick (Thesis advisor) / Kaloush, Kamil (Thesis advisor) / Jiang, Hanqing (Committee member) / Arizona State University (Publisher)
Created2011
Description
A wireless hybrid device for detecting volatile organic compounds (VOCs) has been developed. The device combines a highly selective and sensitive tuning-fork based detector with a pre-concentrator and a separation column. The selectivity and sensitivity of the tuning-fork based detector is optimized for discrimination and quantification of benzene, toluene, ethylbenzene, and xylenes (BTEX) via a homemade molecular imprinted polymer, and a specific detection and control circuit. The device is a wireless, portable, battery-powered, and cell-phone operated device. The device has been calibrated and validated in the laboratory and using selected ion flow tube mass spectrometry (SFIT-MS). The capability and robustness are also demonstrated in some field tests. It provides rapid and reliable detection of BTEX in real samples, including challenging high concentrations of interferents, and it is suitable for occupational, environmental health and epidemiological applications.
ContributorsChen, Zheng (Author) / Tao, Nongjian (Thesis advisor) / Chae, Junseok (Committee member) / Forzani, Erica (Committee member) / Arizona State University (Publisher)
Created2011
Description
The trend towards using recycled materials on new construction projects is growing as the cost for construction materials are ever increasing and the awareness of the responsibility we have to be good stewards of our environment is heightened. While recycled asphalt is sometimes used in pavements, its use as structural fill has been hindered by concern that it is susceptible to large long-term deformations (creep), preventing its use for a great many geotechnical applications. While asphalt/soil blends are often proposed as an alternative to 100% recycled asphalt fill, little data is available characterizing the geotechnical properties of recycled asphalt soil blends. In this dissertation, the geotechnical properties for five different recycled asphalt soil blends are characterized. Data includes the particle size distribution, plasticity index, creep, and shear strength for each blend. Blends with 0%, 25%, 50%, 75% and 100% recycled asphalt were tested. As the recycled asphalt material used for testing had particles sizes up to 1.5 inches, a large 18 inch diameter direct shear apparatus was used to determine the shear strength and creep characteristics of the material. The results of the testing program confirm that the creep potential of recycled asphalt is a geotechnical concern when the material is subjected to loads greater than 1500 pounds per square foot (psf). In addition, the test results demonstrate that the amount of soil blended with the recycled asphalt can greatly influence the creep and shear strength behavior of the composite material. Furthermore, there appears to be an optimal blend ratio where the composite material had better properties than either the recycled asphalt or virgin soil alone with respect to shear strength.
ContributorsSchaper, Jeffery M (Author) / Kavazanjian, Edward (Thesis advisor) / Houston, Sandra L. (Committee member) / Zapata, Claudia E (Committee member) / Arizona State University (Publisher)
Created2011
Description
In geotechnical engineering, measuring the unsaturated hydraulic conductivity of fine grained soils can be time consuming and tedious. The various applications that require knowledge of the unsaturated hydraulic conductivity function are great, and in geotechnical engineering, they range from modeling seepage through landfill covers to determining infiltration of water under a building slab. The unsaturated hydraulic conductivity function can be measured using various direct and indirect techniques. The instantaneous profile method has been found to be the most promising unsteady state method for measuring the unsaturated hydraulic conductivity function for fine grained soils over a wide range of suction values. The instantaneous profile method can be modified by using different techniques to measure suction and water content and also through the way water is introduced or removed from the soil profile. In this study, the instantaneous profile method was modified by creating duplicate soil samples compacted into cylindrical tubes at two different water contents. The techniques used in the duplicate method to measure the water content and matric suction included volumetric moisture probes, manual water content measurements, and filter paper tests. The experimental testing conducted in this study provided insight into determining the unsaturated hydraulic conductivity using the instantaneous profile method for a sandy clay soil and recommendations are provided for further evaluation. Overall, this study has demonstrated that the presence of cracks has no significant impact on the hydraulic behavior of soil in high suction ranges. The results of this study do not examine the behavior of cracked soil unsaturated hydraulic conductivity at low suction and at moisture contents near saturation.
ContributorsJacquemin, Sean Christopher (Author) / Zapata, Claudia (Thesis advisor) / Houston, Sandra (Committee member) / Kavazanjian, Edward (Committee member) / Arizona State University (Publisher)
Created2011
Description
The demand for handheld portable computing in education, business and research has resulted in advanced mobile devices with powerful processors and large multi-touch screens. Such devices are capable of handling tasks of moderate computational complexity such as word processing, complex Internet transactions, and even human motion analysis. Apple's iOS devices, including the iPhone, iPod touch and the latest in the family - the iPad, are among the well-known and widely used mobile devices today. Their advanced multi-touch interface and improved processing power can be exploited for engineering and STEM demonstrations. Moreover, these devices have become a part of everyday student life. Hence, the design of exciting mobile applications and software represents a great opportunity to build student interest and enthusiasm in science and engineering. This thesis presents the design and implementation of a portable interactive signal processing simulation software on the iOS platform. The iOS-based object-oriented application is called i-JDSP and is based on the award winning Java-DSP concept. It is implemented in Objective-C and C as a native Cocoa Touch application that can be run on any iOS device. i-JDSP offers basic signal processing simulation functions such as Fast Fourier Transform, filtering, spectral analysis on a compact and convenient graphical user interface and provides a very compelling multi-touch programming experience. Built-in modules also demonstrate concepts such as the Pole-Zero Placement. i-JDSP also incorporates sound capture and playback options that can be used in near real-time analysis of speech and audio signals. All simulations can be visually established by forming interactive block diagrams through multi-touch and drag-and-drop. Computations are performed on the mobile device when necessary, making the block diagram execution fast. Furthermore, the extensive support for user interactivity provides scope for improved learning. The results of i-JDSP assessment among senior undergraduate and first year graduate students revealed that the software created a significant positive impact and increased the students' interest and motivation and in understanding basic DSP concepts.
ContributorsLiu, Jinru (Author) / Spanias, Andreas (Thesis advisor) / Tsakalis, Kostas (Committee member) / Qian, Gang (Committee member) / Arizona State University (Publisher)
Created2011
Description
Due to the growing concerns on the depletion of petroleum based energy resources and climate change; fuel cell technologies have received much attention in recent years. Proton exchange membrane fuel cell (PEMFCs) features high energy conversion efficiency and nearly zero greenhouse gas emissions, because of its combination of the hydrogen oxidation reaction (HOR) at anode side and oxygen reduction reaction (ORR) at cathode side. Synthesis of Pt nanoparticles supported on multi walled carbon nanotubes (MWCNTs) possess a highly durable electrochemical surface area (ESA) and show good power output on proton exchange membrane (PEM) fuel cell performance. Platinum on multi-walled carbon nanotubes (MWCNTs) support were synthesized by two different processes to transfer PtCl62- from aqueous to organic phase. While the first method of Pt/MWCNTs synthesis involved dodecane thiol (DDT) and octadecane thiol (ODT) as anchoring agent, the second method used ammonium lauryl sulfate (ALS) as the dispersion/anchoring agent. The particle size and distribution of platinum were examined by high-resolution transmission electron microscope (HRTEM). The TEM images showed homogenous distribution and uniform particle size of platinum deposited on the surface of MWCNTs. The single cell fuel cell performance of the Pt/MWCNTs synthesized thiols and ALS based electrode containing 0.2 (anode) and 0.4 mg (cathode) Pt.cm-2 were evaluated using Nafion-212 electrolyte with H2 and O2 gases at 80 oC and ambient pressure. The catalyst synthesis with ALS is relatively simple compared to that with thiols and also showed higher performance (power density reaches about 1070 mW.cm-2). The Electrodes with Pt/MWCNTs nanocatalysts synthesized using ALS were characterized by cyclic voltammetry (CV) for durability evaluation using humidified H2 and N2 gases at room temperature (21 oC) along with commercial Pt/C for comparison. The ESA measured by cyclic voltammetry between 0.15 and 1.2 V showed significant less degradation after 1000 cycles for ALS based Pt/MWCNTs.
ContributorsLiu, Xuan (Author) / Madakannan, Arunachalanadar (Thesis advisor) / Munukutla, Lakshmi (Committee member) / Tamizhmani, Govindasamy (Committee member) / Arizona State University (Publisher)
Created2011
Description
A synbody is a newly developed protein binding peptide which can be rapidly produced by chemical methods. The advantages of the synbody producing process make it a potential human proteome binding reagent. Most of the synbodies are designed to bind to specific proteins. The peptides incorporated in a synbody are discovered with peptide microarray technology. Nevertheless, the targets for unknown synbodies can also be discovered by searching through a protein mixture. The first part of this thesis mainly focuses on the process of target searching, which was performed with immunoprecipitation assays and mass spectrometry analysis. Proteins are pulled down from the cell lysate by certain synbodies, and then these proteins are identified using mass spectrometry. After excluding non-specific bindings, the interaction between a synbody and its real target(s) can be verified with affinity measurements. As a specific example, the binding between 1-4-KCap synbody and actin was discovered. This result proved the feasibility of the mass spectrometry based method and also suggested that a high throughput synbody discovery platform for the human proteome could be developed. Besides the application of synbody development, the peptide microarray technology can also be used for immunosignatures. The composition of all types of antibodies existing in one's blood is related to an individual's health condition. A method, called immunosignaturing, has been developed for early disease diagnosis based on this principle. CIM10K microarray slides work as a platform for blood antibody detection in immunosignaturing. During the analysis of an immunosignature, the data from these slides needs to be validated by using landing light peptides. The second part of this thesis focuses on the validation of the data. A biotinylated peptide was used as a landing light on the new CIM10K slides. The data was collected in several rounds of tests and indicated that the variation among landing lights was significantly reduced by using the newly prepared biotinylated peptide compared with old peptide mixture. Several suggestions for further landing light improvement are proposed based on the results.
ContributorsSun, Minyao (Author) / Johnston, Stephen Albert (Thesis advisor) / Diehnelt, Chris Wayne (Committee member) / Stafford, Phillip (Committee member) / Arizona State University (Publisher)
Created2011