Theses and Dissertations
This collection includes both ASU Theses and Dissertations, submitted by graduate students, and the Barrett, Honors College theses submitted by undergraduate students.
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- All Subjects: MEMS
Description
Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing is challenging since input to test a MEMS device require physical stimulus like acceleration, pressure etc. Also, MEMS device vary with process and requires calibration to make them reliable. This increases test cost and testing time. This challenge can be overcome by combining electrical stimulus based testing along with statistical analysis on MEMS response for electrical stimulus and also limited physical stimulus response data. This thesis proposes electrical stimulus based built in self test(BIST) which can be used to get MEMS data and later this data can be used for statistical analysis. A capacitive MEMS accelerometer is considered to test this BIST approach. This BIST circuit overhead is less and utilizes most of the standard readout circuit. This thesis discusses accelerometer response for electrical stimulus and BIST architecture. As a part of this BIST circuit, a second order sigma delta modulator has been designed. This modulator has a sampling frequency of 1MHz and bandwidth of 6KHz. SNDR of 60dB is achieved with 1Vpp differential input signal and 3.3V supply
ContributorsKundur, Vinay (Author) / Bakkaloglu, Bertan (Committee member) / Ozev, Sule (Committee member) / Kiaei, Sayfe (Committee member) / Arizona State University (Publisher)
Created2013
Description
Power supply management is important for MEMS (Micro-Electro-Mechanical-Systems) bio-sensing and chemical sensing applications. The dissertation focuses on discussion of accessibility to different power sources and supply tuning in sensing applications. First, the dissertation presents a high efficiency DC-DC converter for a miniaturized Microbial Fuel Cell (MFC). The miniaturized MFC produces up to approximately 10µW with an output voltage of 0.4-0.7V. Such a low voltage, which is also load dependent, prevents the MFC to directly drive low power electronics. A PFM (Pulse Frequency Modulation) type DC-DC converter in DCM (Discontinuous Conduction Mode) is developed to address the challenges and provides a load independent output voltage with high conversion efficiency. The DC-DC converter, implemented in UMC 0.18µm technology, has been thoroughly characterized, coupled with the MFC. At 0.9V output, the converter has a peak efficiency of 85% with 9µW load, highest efficiency over prior publication. Energy could be harvested wirelessly and often has profound impacts on system performance. The dissertation reports a side-by-side comparison of two wireless and passive sensing systems: inductive and electromagnetic (EM) couplings for an application of in-situ and real-time monitoring of wafer cleanliness in semiconductor facilities. The wireless system, containing the MEMS sensor works with battery-free operations. Two wireless systems based on inductive and EM couplings have been implemented. The working distance of the inductive coupling system is limited by signal-to-noise-ratio (SNR) while that of the EM coupling is limited by the coupled power. The implemented on-wafer transponders achieve a working distance of 6 cm and 25 cm with a concentration resolution of less than 2% (4 ppb for a 200 ppb solution) for inductive and EM couplings, respectively. Finally, the supply tuning is presented in bio-sensing application to mitigate temperature sensitivity. The FBAR (film bulk acoustic resonator) based oscillator is an attractive method in label-free sensing application. Molecular interactions on FBAR surface induce mass change, which results in resonant frequency shift of FBAR. While FBAR has a high-Q to be sensitive to the molecular interactions, FBAR has finite temperature sensitivity. A temperature compensation technique is presented that improves the temperature coefficient of a 1.625 GHz FBAR-based oscillator from -118 ppm/K to less than 1 ppm/K by tuning the supply voltage of the oscillator. The tuning technique adds no additional component and has a large frequency tunability of -4305 ppm/V.
ContributorsZhang, Xu (Author) / Chae, Junseok (Thesis advisor) / Kiaei, Sayfe (Committee member) / Bakkaloglu, Bertan (Committee member) / Kozicki, Michael (Committee member) / Phillips, Stephen (Committee member) / Arizona State University (Publisher)
Created2012