A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-three-layer actuator offers higher performance than the two-layer and three-layer actuators with regard to the two most important characteristics of actuators, namely, driving force and theoretical stroke. Given that the pseudo-three-layer actuator structure is compatible with both the parallel-plate actuators and these two types of repulsive actuators, a 19-element two-layer repulsive actuated deformable mirror is operated in pseudo-three-layer electrical connection mode. Theoretical and experimental results demonstrate that the pseudo-three-layer mode produces a larger displacement of 0–4.5 μm for a dc driving voltage of 0–100 V, when compared with that in two-layer mode.
Details
- Electrostatic Repulsive Out-Of-Plane Actuator Using Conductive Substrate
- Wang, Weimin (Author)
- Wang, Qiang (Author)
- Ren, Hao (Author)
- Ma, Wenying (Author)
- Qiu, Chuankai (Author)
- Chen, Zexiang (Author)
- Fan, Bin (Author)
- Ira A. Fulton Schools of Engineering (Contributor)
- Digital object identifier: 10.1038/srep35118
- Identifier TypeInternational standard serial numberIdentifier Value2045-2322
- The final version of this article, as published in Scientific Reports, can be viewed online at: https://www.nature.com/articles/srep35118, opens in a new window
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Wang, W., Wang, Q., Ren, H., Ma, W., Qiu, C., Chen, Z., & Fan, B. (2016). Electrostatic repulsive out-of-plane actuator using conductive substrate. Scientific Reports, 6(1). doi:10.1038/srep35118