Description

Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that

Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that ensures the continuous reliability and accuracy is a crucial need. The main purpose of testing is to eliminate defective devices and to verify the qualifications of a product is met. The calibration process for capacitive MEMS devices, for the most part, entails the determination of the mechanical sensitivity.

Reuse Permissions
  • 3.64 MB application/pdf

    Download count: 0

    Details

    Contributors
    Date Created
    • 2017
    Resource Type
  • Text
  • Collections this item is in
    Note
    • Doctoral Dissertation Electrical Engineering 2017

    Machine-readable links