Full metadata
Title
Modeling and calibration of a MEMS tensile stage for elevated temperature experiments on freestanding metallic thin films
Description
Mechanical behavior of metallic thin films at room temperature (RT) is relatively well characterized. However, measuring the high temperature mechanical properties of thin films poses several challenges. These include ensuring uniformity in sample temperature and minimizing temporal fluctuations due to ambient heat loss, in addition to difficulties involved in mechanical testing of microscale samples. To address these issues, we designed and analyzed a MEMS-based high temperature tensile testing stage made from single crystal silicon. The freestanding thin film specimens were co-fabricated with the stage to ensure uniaxial loading. Multi-physics simulations of Joule heating, incorporating both radiation and convection heat transfer, were carried out using COMSOL to map the temperature distribution across the stage and the specimen. The simulations were validated using temperature measurements from a thermoreflectance microscope.
Date Created
2016
Contributors
- Eswarappa Prameela, Suhas (Author)
- Rajagopalan, Jagannathan (Thesis advisor)
- Wang, Liping (Committee member)
- Jiao, Yang (Committee member)
- Arizona State University (Publisher)
Topical Subject
Resource Type
Extent
vii, 47 pages : illustrations (mostly color)
Language
Copyright Statement
In Copyright
Primary Member of
Peer-reviewed
No
Open Access
No
Handle
https://hdl.handle.net/2286/R.I.38741
Statement of Responsibility
by Suhas Eswarappa Prameela
Description Source
Retrieved on Oct. 12, 2016
Level of coding
full
Note
Partial requirement for: M.S., Arizona State University, 2016
Note type
thesis
Includes bibliographical references (pages 45-47)
Note type
bibliography
Field of study: Materials Science and Engineering
System Created
- 2016-06-01 08:59:06
System Modified
- 2021-08-30 01:22:47
- 2 years 7 months ago
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