This dissertation presents my work on development of deformable electronics using microelectromechanical systems (MEMS) based fabrication technologies. In recent years, deformable electronics are coming to revolutionize the functionality of microelectronics seamlessly with their application environment, ranging from various consumer electronics to bio-medical applications. Many researchers have studied this area, and a wide variety of devices have been fabricated. One traditional way is to directly fabricate electronic devices on flexible substrate through low-temperature processes.
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- Partial requirement for: Ph.D., Arizona State University, 2014Note typethesis
- Includes bibliographical references (p. 87-93)Note typebibliography
- Field of study: Electrical engineering