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A good production schedule in a semiconductor back-end facility is critical for the on time delivery of customer orders. Compared to the front-end process that is dominated by re-entrant product

A good production schedule in a semiconductor back-end facility is critical for the on time delivery of customer orders. Compared to the front-end process that is dominated by re-entrant product flows, the back-end process is linear and therefore more suitable for scheduling. However, the production scheduling of the back-end process is still very difficult due to the wide product mix, large number of parallel machines, product family related setups, machine-product qualification, and weekly demand consisting of thousands of lots.

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    Date Created
    • 2011
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  • Text
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    • Partial requirement for: Ph.D., Arizona State University, 2011
      Note type
      thesis
    • Includes bibliographical references (p
    • Field of study: Industrial engineering

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    Mengying Fu

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