The essence of this research is the reconciliation and standardization of feature fitting algorithms used in Coordinate Measuring Machine (CMM) software and the development of Inspection Maps (i-Maps) for representing geometric tolerances in the inspection stage based on these standardized algorithms. The i-Map is a hypothetical point-space that represents the substitute feature evaluated for an actual part in the inspection stage. The first step in this research is to investigate the algorithms used for evaluating substitute features in current CMM software. For this, a survey of feature fitting algorithms available in the literature was performed and then a case study was done to reverse engineer the feature fitting algorithms used in commercial CMM software. The experiments proved that algorithms based on least squares technique are mostly used for GD&T; inspection and this wrong choice of fitting algorithm results in errors and deficiency in the inspection process. Based on the results, a standardization of fitting algorithms is proposed in light of the definition provided in the ASME Y14.5 standard and an interpretation of manual inspection practices. Standardized algorithms for evaluating substitute features from CMM data, consistent with the ASME Y14.5 standard and manual inspection practices for each tolerance type applicable to planar features are developed. Second, these standardized algorithms developed for substitute feature fitting are then used to develop i-Maps for size, orientation and flatness tolerances that apply to their respective feature types. Third, a methodology for Statistical Process Control (SPC) using the I-Maps is proposed by direct fitting of i-Maps into the parent T-Maps. Different methods of computing i-Maps, namely, finding mean, computing the convex hull and principal component analysis are explored. The control limits for the process are derived from inspection samples and a framework for statistical control of the process is developed. This also includes computation of basic SPC and process capability metrics.