Matching Items (3)
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- All Subjects: Microelectromechanical Systems
- All Subjects: Microwave Sub-wavelength Surface Imaging
- Creators: Aberle, James T
- Resource Type: Text
Description
ABSTRACT This work seeks to develop a practical solution for short range ultrasonic communications and produce an integrated array of acoustic transmitters on a flexible substrate. This is done using flexible thin film transistor (TFT) and micro electromechanical systems (MEMS). The goal is to develop a flexible system capable of communicating in the ultrasonic frequency range at a distance of 10 - 100 meters. This requires a great deal of innovation on the part of the FDC team developing the TFT driving circuitry and the MEMS team adapting the technology for fabrication on a flexible substrate. The technologies required for this research are independently developed. The TFT development is driven primarily by research into flexible displays. The MEMS development is driving by research in biosensors and micro actuators. This project involves the integration of TFT flexible circuit capabilities with MEMS micro actuators in the novel area of flexible acoustic transmitter arrays. This thesis focuses on the design, testing and analysis of the circuit components required for this project.
ContributorsDaugherty, Robin (Author) / Allee, David R. (Thesis advisor) / Chae, Junseok (Thesis advisor) / Aberle, James T (Committee member) / Vasileska, Dragica (Committee member) / Arizona State University (Publisher)
Created2012
Description
Graphene is a very strong two-dimensional material with a lot of potential applications in microelectromechanical systems (MEMS). In this research, graphene is being optimized for use in a 5 m x 5 m graphene resonator. To work properly, this graphene resonator must have a uniform strain across all manufactured devices. To reduce strain induced in graphene sheets grown for use in these resonators, evaporated platinum has been used in this investigation due to its relatively lower surface roughness compared to copper films. The final goal is to have the layer of ultrathin platinum (<=200 nm) deposited on the MEMS graphene resonator and used to grow graphene directly onto the devices to remove the manual transfer step due to its inscalability. After growth, graphene is coated with polymer and the platinum is then etched. This investigation concentrated on the transfer process of graphene onto Si/SiO2 substrate from the platinum films. It was determined that the ideal platinum etchant was aqua regia at a volumetric ratio of 6:3:1 (H2O:HCl:HNO3). This concentration was dilute enough to preserve the polymer and graphene layer, but strong enough to etch within a day. Type and thickness of polymer support layers were also investigated. PMMA at a thickness of 200 nm was ideal because it was easy to remove with acetone and strong enough to support the graphene during the etch process. A reference growth recipe was used in this investigation, but now that the transfer has been demonstrated, growth can be optimized for even thinner films.
ContributorsCayll, David Richard (Author) / Tongay, Sefaattin (Thesis director) / Lee, Hyunglae (Committee member) / Mechanical and Aerospace Engineering Program (Contributor) / Barrett, The Honors College (Contributor)
Created2016-12
Description
To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection because the scattered signals from a multiplicity of such elements would end up interfering with each other. However, an alternative massively parallelized configuration, consisting of a remotely interrogating array of dipoles, capable of interrogating multiple adjacent areas of the surface at the same time, was proposed in 2002.
In the present work a remotely interrogating slot antenna inside a 60nm silver slab is designed which increases the signal to noise ratio of the original system. The antenna is tuned to resonance at 600nm range by taking advantage of the plasmon resonance properties of the metal’s negative permittivity and judicious shaping of the slot element. Full-physics simulations show the capability of detecting an 8nm particle using red light illumination. The sensitivity to the λ/78 particle is attained by detecting the change induced on the antenna’s far field signature by the proximate particle, a change that is 15dB greater than the scattering signature of the particle by itself.
To verify the capabilities of this technology in a readily accessible experimental environment, a radiofrequency scale model is designed using a meta-material to mimic the optical properties of silver in the 2GHz to 5GHz range. Various approaches to the replication of the metal’s behavior are explored in a trade-off between fidelity to the metal’s natural plasmon response, desired bandwidth of the demonstration, and
ii
manufacturability of the meta-material. The simulation and experimental results successfully verify the capability of the proposed near-field sensor in sub-wavelength detection and imaging not only as a proof of concept for optical frequencies but also as a potential imaging device for radio frequencies.
In the present work a remotely interrogating slot antenna inside a 60nm silver slab is designed which increases the signal to noise ratio of the original system. The antenna is tuned to resonance at 600nm range by taking advantage of the plasmon resonance properties of the metal’s negative permittivity and judicious shaping of the slot element. Full-physics simulations show the capability of detecting an 8nm particle using red light illumination. The sensitivity to the λ/78 particle is attained by detecting the change induced on the antenna’s far field signature by the proximate particle, a change that is 15dB greater than the scattering signature of the particle by itself.
To verify the capabilities of this technology in a readily accessible experimental environment, a radiofrequency scale model is designed using a meta-material to mimic the optical properties of silver in the 2GHz to 5GHz range. Various approaches to the replication of the metal’s behavior are explored in a trade-off between fidelity to the metal’s natural plasmon response, desired bandwidth of the demonstration, and
ii
manufacturability of the meta-material. The simulation and experimental results successfully verify the capability of the proposed near-field sensor in sub-wavelength detection and imaging not only as a proof of concept for optical frequencies but also as a potential imaging device for radio frequencies.
ContributorsMostafavi, Mahkamehossadat (Author) / Diaz, Rodolfo E (Thesis advisor) / Pan, George W (Committee member) / Aberle, James T (Committee member) / Ning, Cun-Zheng (Committee member) / Arizona State University (Publisher)
Created2016