Characterization of oxide thin films and interfaces using transmission electron microscopy

Ajit Dhamdhere

Multifunctional oxide thin-films grown on silicon and several oxide substrates have been characterized using High Resolution (Scanning) Transmission Electron Microscopy (HRTEM), Energy-Dispersive X-ray Spectroscopy (EDX), and Electron Energy-Loss Spectroscopy (EELS).…

Multifunctional oxide thin-films grown on silicon and several oxide substrates have been characterized using High Resolution (Scanning) Transmission Electron Microscopy (HRTEM), Energy-Dispersive X-ray Spectroscopy (EDX), and Electron Energy-Loss Spectroscopy (EELS). Oxide thin films grown on SrTiO3/Si pseudo-substrate showed the presence of amorphised SrTiO3 (STO) at the STO/Si interface. Oxide/oxide interfaces were observed to be atomically clean with very few defects.

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Dhamdhere, Ajit (Author)
Smith, David J. (Thesis advisor)
McCartney, Martha R. (Committee member)
Chamberlin, Ralph (Committee member)
Ponce, Fernando (Committee member)
Arizona State University (Publisher)

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2015

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Partial requirement for: Ph.D., Arizona State University, 2015

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thesis
Includes bibliographical references

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bibliography
Field of study: Physics

Characterization of oxide thin films and interfaces using transmission electron microscopy

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