Mass spectrometric analysis requires that atoms from the sample be ionized in the gas phase. Secondary ion mass spectrometry achieves this by sputtering samples with an energetic primary ion beam. Several investigations of the sputtering and ionization process have been conducted. Oxygen is commonly used in secondary ion mass spectrometry (SIMS) to increase ion yields, but also can complicate the interpretation of SIMS analyses.
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- Partial requirement for: Ph.D., Arizona State University, 2012Note typethesis
- Includes bibliographical referencesNote typebibliography
- Field of study: Chemistry