Description

This thesis discusses the use of low temperature microwave anneal as an alternative technique to recrystallize materials damaged or amorphized due to implantation techniques.

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    Date Created
    • 2011
    Resource Type
  • Text
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    Note
    • Partial requirement for: M.S., Arizona State University, 2011
      Note type
      thesis
    • Includes bibliographical references (p. 63-65)
      Note type
      bibliography
    • Field of study: Materials science and engineering

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    by Rajitha Vemuri

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