Description
Yield is a key process performance characteristic in the capital-intensive semiconductor fabrication process. In an industry where machines cost millions of dollars and cycle times are a number of months, predicting and optimizing yield are critical to process improvement, customer satisfaction, and financial success.
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Contributors
- Krueger, Dana Cheree (Author)
- Montgomery, Douglas C. (Thesis advisor)
- Fowler, John (Committee member)
- Pan, Rong (Committee member)
- Pfund, Michele (Committee member)
- Arizona State University (Publisher)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
2011
Subjects
- Industrial Engineering
- Statistics
- management
- generalized linear mixed models
- Generalized Linear Models
- Process Improvement
- quality and reliability engineering
- Semiconductor
- yield modeling
- Linear models (Statistics)
- Semiconductor industry--Management--Mathematical models.
- Semiconductor Industry
- Revenue management--Mathematical models.
- Revenue management
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Note
- Partial requirement for: Ph.D., Arizona State University, 2011Note typethesis
- Includes bibliographical references (p. 160-166)Note typebibliography
- Field of study: Industrial engineering
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Statement of Responsibility
by Dana Cheree Krueger