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The thesis focuses on cost-efficient integration of the electro-chemical residue sensor (ECRS), a novel sensor developed for the in situ and real-time measurement of the residual impurities left on the

The thesis focuses on cost-efficient integration of the electro-chemical residue sensor (ECRS), a novel sensor developed for the in situ and real-time measurement of the residual impurities left on the wafer surface and in the fine structures of patterned wafers during typical rinse processes, and wireless transponder circuitry that is based on RFID technology. The proposed technology uses only the NMOS FD-SOI transistors with amorphous silicon as active material with silicon nitride as a gate dielectric. The proposed transistor was simulated under the SILVACO ATLAS Simulation Framework.

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    Date Created
    • 2010
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  • Text
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    • Partial requirement for: M.S., Arizona State University, 2010
      Note type
      thesis
    • Includes bibliographical references (p. 77)
      Note type
      bibliography
    • Field of study: Electrical engineering

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    by Vedhas Pandit

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