Description

In order to process a product in a semiconductor back-end facility, a machine needs to be qualified, first by having product-specific software installed and then running test wafers through it

In order to process a product in a semiconductor back-end facility, a machine needs to be qualified, first by having product-specific software installed and then running test wafers through it to verify that the machine is capable of performing the process correctly. In general, not all machines are qualified to process all products due to the high machine qualification cost and tool set availability. The machine qualification decision affects future capacity allocation in the facility and subsequently affects daily production schedules.

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Date Created
  • 2015-07-03
Resource Type
  • Text
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    Identifier
    • Digital object identifier: 10.1080/0740817X.2014.964887
    • Identifier Type
      International standard serial number
      Identifier Value
      0740-817X
    • Identifier Type
      International standard serial number
      Identifier Value
      1573-9724
    Note
    • This is an Author's Accepted Manuscript of an article published as Fu, Mengying, Askin, Ronald, Fowler, John, & Zhang, Muhong (2015). Stochastic optimization of product-machine qualification in a semiconductor back-end facility. IIE TRANSACTIONS, 47(7), 739-750. DOI: 10.1080/0740817X.2014.964887. Copyright Taylor & Francis, available online at: http://www.tandfonline.com/doi/abs/10.1080/0740817X.2014.964887, opens in a new window

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    This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.

    Fu, Mengying, Askin, Ronald, Fowler, John, & Zhang, Muhong (2015). Stochastic optimization of product-machine qualification in a semiconductor back-end facility. IIE TRANSACTIONS, 47(7), 739-750. http://dx.doi.org/10.1080/0740817X.2014.964887

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