Description
A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping.
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Contributors
- Wang, Weimin (Author)
- Wang, Qiang (Author)
- Ren, Hao (Author)
- Ma, Wenying (Author)
- Qiu, Chuankai (Author)
- Chen, Zexiang (Author)
- Fan, Bin (Author)
- Ira A. Fulton Schools of Engineering (Contributor)
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2016-10-07
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Identifier
- Digital object identifier: 10.1038/srep35118
- Identifier TypeInternational standard serial numberIdentifier Value2045-2322
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- The final version of this article, as published in Scientific Reports, can be viewed online at: https://www.nature.com/articles/srep35118, opens in a new window
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Wang, W., Wang, Q., Ren, H., Ma, W., Qiu, C., Chen, Z., & Fan, B. (2016). Electrostatic repulsive out-of-plane actuator using conductive substrate. Scientific Reports, 6(1). doi:10.1038/srep35118