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A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed

A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping.

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    Date Created
    • 2016-10-07
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    Identifier
    • Digital object identifier: 10.1038/srep35118
    • Identifier Type
      International standard serial number
      Identifier Value
      2045-2322
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    Wang, W., Wang, Q., Ren, H., Ma, W., Qiu, C., Chen, Z., & Fan, B. (2016). Electrostatic repulsive out-of-plane actuator using conductive substrate. Scientific Reports, 6(1). doi:10.1038/srep35118

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