A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping.
Download count: 0
- Digital object identifier: 10.1038/srep35118
- Identifier TypeInternational standard serial numberIdentifier Value2045-2322
- The final version of this article, as published in Scientific Reports, can be viewed online at: https://www.nature.com/articles/srep35118, opens in a new window
Citation and reuse
Cite this item
This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.
Wang, W., Wang, Q., Ren, H., Ma, W., Qiu, C., Chen, Z., & Fan, B. (2016). Electrostatic repulsive out-of-plane actuator using conductive substrate. Scientific Reports, 6(1). doi:10.1038/srep35118