To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features.
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- Digital object identifier: 10.1038/srep26172
- Identifier TypeInternational standard serial numberIdentifier Value2045-2322
- The final version of this article, as published in Scientific Reports, can be viewed online at: http://www.nature.com/articles/srep26172, opens in a new window
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Mostafavi, M., & Diaz, R. E. (2016). Feasibility demonstration of a massively parallelizable optical near-field sensor for sub-wavelength defect detection and imaging. Scientific Reports, 6(1). doi:10.1038/srep26172