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To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality

To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection because the scattered signals from a multiplicity of such elements would end up interfering with each other. However, an alternative massively parallelized configuration, capable of interrogating multiple adjacent areas of the surface at the same time, was proposed in 2002.

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    Date Created
    • 2016-05-17
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  • Text
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    Identifier
    • Digital object identifier: 10.1038/srep26172
    • Identifier Type
      International standard serial number
      Identifier Value
      2045-2322
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    Mostafavi, M., & Diaz, R. E. (2016). Feasibility demonstration of a massively parallelizable optical near-field sensor for sub-wavelength defect detection and imaging. Scientific Reports, 6(1). doi:10.1038/srep26172

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